Claims
- 1. A charged beam processing apparatus comprising:
- a supporting table having a hole provided in the center thereof,
- a material reinforcing plate for supporting a sample chip piece, said material reinforcing plate being of an annular shape and provided on an inner peripheral edge of the hole,
- a surface guard plate pressingly and removably fixed to the supporting table for sealing the hole on a non-abraded surface side of said sample chip piece,
- a frame fixed to the supporting table and holding said surface guard plate,
- an annular presser plate provided on the supporting table for scaling an annular clearance between the supporting table and the material reinforcing plate on the non-abraded surface of the sample chip piece, and
- a charged beam a hole defined in said material reinforcing plate so that the sample chip piece is processed.
- 2. An apparatus according to claim 1, further comprising springs by which the frame resiliently presses the surface guard plate against a lower surface of the supporting table.
- 3. An apparatus as in claim 1, wherein said surface guard plate comprises a glass plate having a thickness of about 150 to 200 .mu.m.
- 4. An apparatus as in claim 1, wherein said supporting table is rotatable.
- 5. An improved charged particle beam processing apparatus including a rotatable support table having a hole in the center thereof, a material reinforcing plate for supporting a sample chip piece to be processed, wherein the material reinforcing plate is of an annular shape and is provided on an inner peripheral edge of the support table hole, said improvement comprising:
- a frame fixed to ne surface of said support table;
- a surface guard plate placed within aid frame for covering said support table hole;
- resilient means positioned between said frame and said surface guard plate for urging said surface guard plate into sealing engagement with aid support table; and
- a presser plate provided on another surface of said support table for covering aid inner peripheral edge of the support table hole while said sample chip piece is processed.
- 6. The improved apparatus of claim 5, wherein said surface guard plate comprises a glass plate having a thickness of about 150 to 200 .mu.m.
- 7. The improved apparatus of claim 5, further comprising:
- packing material provided between said support table and said surface guard plate as well as between said support table and said presser plate for sealing said plates to said support table.
Priority Claims (2)
Number |
Date |
Country |
Kind |
1-339295 |
Dec 1989 |
JPX |
|
1-344027 |
Dec 1989 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 07/633,307, filed Dec. 24, 1990, now U.S. Pat. No. 5,089,774.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
4154530 |
Connolly, Jr. et al. |
May 1979 |
|
Divisions (1)
|
Number |
Date |
Country |
Parent |
33307 |
Dec 1990 |
|