Claims
- 1. An apparatus for mixing gases, suitable for use in the manufacture of an electronic device, comprising:(a) a gas mixing manifold; (b) a first, bulk gas source connected to introduce a flow of a first gas to the manifold; (c) a second gas source connected to introduce a flow of a second gas to the manifold, wherein the first and second gases are mixed in the manifold, thereby forming a gas mixture; (d) a conduit connected to one or more point of use for introducing a flow of the gas mixture thereto; and (e) a gas mixture vent conduit arranged upstream of the one or more point of use for removing a flow of the gas mixture from the apparatus, wherein the gas mixture vent conduit maintains the continuous flow of the first and second gases when the gas mixture is not introduced to the one or more point of use.
- 2. A method for mixing gases, suitable for use in the manufacture of an electronic device, comprising:(a) providing a gas mixing manifold; (b) introducing a flow of a first gas to the manifold from a first, bulk gas source; (c) introducing a flow of a second gas to the manifold from a second gas source, wherein the first and second gases are mixed in the manifold, thereby forming a gas mixture; and (d) introducing a flow of the gas mixture to one or more point of use (e) continuously removing the gas mixture form the gas mixing manifold via a gas mixture vent conduit arranged upstream of the one or more point of use.
- 3. The method of claim 2, wherein the gas mixture vent conduit maintains the continuous flow of the first and second gases when the gas mixture is not introduced to the one or more point of use.
- 4. An apparatus for mixing gases, suitable for use in the manufacture of an electronic device, consisting of:(a) a gas mixing manifold; (c) a first, bulk gas source connected to introduce a flow of a first gas to the manifold; a. a second gas source connected to introduce a flow of a second gas to the manifold, wherein the first and second gases are mixed in the manifold, thereby forming a gas mixture; b. a conduit connected to one or more points of use for introducing a flow of the gas mixture thereto; and c. a gas mixture vent conduit arranged upstream of the one or more points of use for removing a flow of the gas mixture from the apparatus, wherein the gas mixture vent conduit maintains the continuous flow of the first and second gases when the gas mixture is not introduced to the one or more points of use.
- 5. A method for mixing gases, suitable for use in the manufacture of an electronic device, consisting of:(a) providing a gas mixing manifold; (b) introducing a flow of a first gas to the manifold from a first, bulk gas source; (c) introducing a flow of a second gas to the manifold from a second gas source, wherein the first and second gases are mixed in the manifold, thereby forming a gas mixture; (d) introducing a flow of the gas mixture to one or more points of use, and (e) continuously removing the gas mixture from the gas mixing manifold via a gas mixture vent conduit arranged upstream of the one or more points of use.
- 6. The method of claim 5, wherein the gas mixture vent conduit maintains the continuous flow of the first and second gases when the gas mixture is not introduced to the one or more points of use.
CROSS REFERENCE TO RELATED APPLICATION
This application claims under 35 U.S.C. §119(e) the benefit of provisional application Ser. No. 60/180,462, filed Feb. 4, 2000, the contents of which application are incorporated herein by reference.
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Provisional Applications (1)
|
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|
60/180462 |
Feb 2000 |
US |