Apparatus and methods for treating substrates

Abstract

This invention is related to an apparatus for treating substrates. According to the present invention, the substrate is cleaned by injecting high temperature and high pressure steam on substrate. A steam generator is configured to continually provide steam on substrate. After cleaning by steam, cleaning by brush may be followed.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional view of an apparatus for treating substrate according to a preferred embodiment of the present invention.

FIG. 2 illustrates a plan view of the apparatus for treating substrate of FIG. 1.

FIG. 3 a and FIG. 3b illustrate front views of examples of nozzle of FIG. 1, respectively.

FIG. 4 a and FIG. 4b illustrate cross-sectional views of examples of nozzle of FIG. 1, respectively.

FIG. 5 illustrates a simplified view of the steam generating member.

FIG. 6 illustrates a flow-chart showing sequential substrate cleaning method using the device in FIG. 1.

FIG. 7 illustrates briefly the substrate cleaning process using steam illustrated in FIG. 1.

FIG. 8 and FIG. 9 illustrate other examples of device in FIG. 1, respectively.

Claims

1. An apparatus for treating substrates comprising: a chamber having a space in which process is performed and substrate is accommodated; anda steam cleaning member for supplying steam to a substrate disposed inside the chamber to clean the substrate,wherein the steam cleaning member comprises:a steam generator for generating steam from cleaning liquid;a steam nozzle provided to the chamber, to directly inject the steam generated from the steam generator to the substrate.

2. The apparatus of claim 1 wherein, the substrate has a rectangular shape; andthe steam nozzle is provided in a length to inject steam, the length being corresponding to a first side of the substrate,further comprising a moving unit moving in a straight line the steam nozzle or the substrate in a direction parallel to the second side vertical to the first side.

3. The apparatus of claim 1 further comprising: a moving unit provided to the chamber, to move the substrate in a straight line wherein the moving unit comprises:rotative shafts juxtaposed in the moving direction of the substrate; androllers contacting the substrate, the rollers being disposed on outer surface of the shafts to rotate with the shaft, respectively; andwherein the steam nozzle is disposed in a vertical direction to the moving direction of the substrate.

4. The apparatus of claim 1 wherein, the substrate has a disc shape;the steam nozzle is provided with a length to inject steam, the length being corresponding to diameter of the substrate; andfurther comprising a moving unit for moving the steam nozzle or the substrate in a straight line.

5. The apparatus of claim 1 wherein, the steam nozzle has a rod shape, and a slit or a plurality of circular holes are formed lengthwise at the steam nozzle.

6. The apparatus of claim 1 wherein, the steam generator comprises: a housing in which a space is provided for receiving cleaning liquid;a liquid supply pipe configured to supply cleaning liquid to the housing;a heater for heating the cleaning liquid provided in a space of the housing; anda steam supply pipe configured to supply steam generated in the space of the housing to the steam nozzle.

7. The apparatus of claim 6 wherein, the steam generator further comprises a gas supply pipe configured to supply pressurized gas to the space in the housing such that a hydraulic pressure is applied to the steam generated within the housing.

8. The apparatus of claim 7, wherein the steam generator comprise: the steam generator comprises a pressure gauge for measuring an inner pressure of the steam supply pipe; anda controller for controlling a flow controller installed at the gas supply pipe, the controller receiving a measured signal from the pressure gauge to enable the inner pressure of the steam supply pipe to be maintained within a set scope during a process.

9. The apparatus of claim 7 wherein the steam generator comprises: a pump installed at the liquid supply pipe, to apply a hydraulic pressure to the cleaning liquid supplied into the housing;a level detector for detecting the level of the cleaning liquid filled in space of the housing;a controller for controlling the valve and/or the pump installed at the liquid supply pipe, the controller receiving a detected signal from the level detector to enable the level to be maintained within a set scope during a process.

10. The apparatus of claim 6 wherein, the steam generator further comprises a reverse-flow preventing member installed at the liquid supply pipe for preventing the steam in the housing from flowing reversely to the liquid supply pipe.

11. An apparatus for treating substrates comprising: a moving unit moving substrates in a straight line;a cleaning unit configured to clean substrates being moved by the moving unit, wherein the cleaning unit comprises:a steam cleaning member having steam nozzle configured to supply steam to the substrate, the steam cleaning member configured to clean the substrate by steam;a brush cleaning member having a brush configured to clean the region on the substrate where steam cleaning has been performed.

12. The apparatus of claim 11 wherein, the device further comprises a chamber where cleaning process is performed, the chamber of which the steam nozzle and the brush are disposed,wherein the moving unit comprises:rotative shafts disposed in the chamber, the rotative shafts disposed parallel to the moving direction of the substrate;rollers contacting the substrate, the rollers being disposed on surface of the shafts to rotate with the shaft, respectively; and,wherein the steam nozzle is provided in a length to inject steam, the length being corresponding to a side of the substrate, and the steam nozzle is disposed vertical to the moving direction of the substrate.

13. The apparatus of claim 11 wherein the steam generator comprises: a housing having space where cleaning liquid is provided;a liquid supply pipe where cleaning liquid is supplied to the housing;a heater for heating the cleaning liquid provided in the space of the housing; anda steam supply pipe providing steam generated within the space of the housing to the steam nozzle.

14. The apparatus of claim 13 wherein the steam generator further comprises: a gas supply pipe providing pressurized gas to space in the housing to provide hydraulic pressure to the steam generated within the housing.

15. The apparatus of claim 14 wherein the steam generator further comprises: a pressure gauge measuring pressure in the steam supply pipe;a controller controlling a flow controller installed in the gas supply pipe by having signal authorized which the signal is measured in the pressure gauge so that the pressure in the steam supply pipe is maintained within set scope during a process.

16. The apparatus of claim 14 wherein the steam generator further comprises: a pump disposed in the liquid supply pipe, the pump applying hydraulic pressure to the cleaning liquid supplied to the housing;a level detector detecting the level of the cleaning liquid filled in space of the housing;a controller controlling the valve and/or the pump disposed in the liquid supply pipe by having signal authorized which the signal is measured in the pressure gauge so that the pressure in the steam supply pipe is maintained within set scope during a process.

17. The apparatus of claim 6 wherein, the steam generator is disposed in the liquid supply pipe and, the steam generator further comprises a reverse-flow preventing member preventing reverse-flow of the steam to the liquid supply pipe in the housing.

18. A method for treating substrates wherein, a steam nozzle is disposed on top or bottom of the substrate, the steam nozzle configured to inject steam directly to the substrate in a length corresponding to a side of the substrate, andthe substrate or the steam nozzle is moved in a straight line so that cleaning may be performed from first line to other lines successively in the substrate.

19. The methods of claim 18 wherein, water is provided into the housing where the housing is heated to generate steam to be provided to the steam nozzle, andthe quantity of pressurized gas provided to the housing is adjusted to adjust the inject pressure of the injected steam.

20. The methods of claim 18 wherein, cleaning by brush is done immediately after cleaning by the steam is performed to the substrate.

21. The methods of claim 18 wherein, drying is done immediately after cleaning by the steam is performed to the substrate.

22. A method for treating substrates wherein, steam is injected onto the substrate to weaken adhesion of impurities on the substrates which the impurities are removed from the substrate by using brush.

23. The method of claim 22 wherein, the steam nozzle configured to inject steam to the substrate has a length that may inject steam in a length corresponding to a side of the substrate, the brush has a length corresponding to a side of the substrate,the substrate moves in a straight line, and the steam nozzle and the brush are disposed vertically from the moving direction of the substrate.