The way in which the invention can be implemented and its resulting advantages will be made more readily understandable by the descriptions of the following embodiments, given merely by way of example, reference being made to the accompanying drawings.
a to 3c are schematic views showing the disadvantages of prior-art methods of assembling.
a to 4d are schematic side views showing certain steps in a first embodiment of the method of assembling which is the subject of this invention.
a to 5d are schematic side views showing certain steps in a second embodiment of the method of assembling which is the subject of this invention.
a and 7b are schematic side and front views of a third embodiment of the assembly which is the subject of this invention,
a and 10b are schematic perspective views showing two steps in another embodiment of the method of assembling which is the subject of this invention.
d illustrates a first embodiment of the assembly according to the invention. Object 401 is a Vertical Cavity Surface Emitting Laser (VCSEL) capable of emitting laser beam 404
Object 401 is assembled with support 402 by using several solder bumps 403. In order to attach solder bumps 403 to object 401, the latter has a wettability area 411 for each solder bump 403. Similarly, in order to attach solder bumps 403 to support 402, in this case a microelectronic platform, support 402 has a wettability area 412 for each solder bump 403. Given the wettability of these areas, each solder bump 403 substantially covers wettability areas 411 and 412, with which it comes into contact when it is in the remelted state of the solder material.
In the example in
In this case, solder bumps 403 consist of a fusible alloy of 60% tin (Sn) and 40% lead (Pb), whereas wettability areas 411 and 412 consist of stacks of thin layers of metals such as titanium (Ti), nickel (Ni) and gold (Au).
Such materials are in fact capable of cooperating in order to form bumps 403 that substantially or completely cover each wettability area 411 and 412. To obtain such coverage, it is known that the interface energy between the material that constitutes solder bump 403 and the material that constitutes wettability area 411 or 412 must be sufficiently low for the liquid to spread over the surface of wettability area 411 or 412.
In order to optimise the wettability of areas 411 and 412, one can make provision, as in the case of
Moreover, in order to make the solder bumps, one starts by producing underbump metallisations on the object (
As is known, when the solder material is in a liquid state, it tends to form a globule or sphere wherever it is in contact with the ambient air. In fact, the system consisting of the liquid solder material and the air which surrounds it tends to minimise the surface energy and this results in the formation of a sphere in order to minimise the surface-area to volume-of-material ratio.
Note that use of the French term “bille” [bump], which usually denotes a spherical shape, to describe solder material 403 is not strictly correct because, firstly, this shape is truncated by the wettability areas and, secondly, the wettability areas, depending on their relative position, may exert low-intensity forces on the solder material, thus deforming the bump into an ellipsoid or even a more complex shape. This imprecise term has nevertheless gained acceptance in practical use in various technical fields and the term “bille” is therefore employed in this description to denote the shape adopted by the solder material when it comes into contact with air and wettability areas. In every case, the shape of solder bumps depends on the quantity of fusible material used and on the dimensions and positions of the wettability areas of the object and the support.
Given the conductive nature of the material that constitutes solder bumps 403, they also ensure electrical contact between wettability areas 411 and 412 and, as a result, between a circuit of support 402 and a circuit of object 401. Such electrical contact therefore makes it possible to pass current between said circuits so as to power object 401 if it is an “active” component such as VCSEL laser emitter 401.
Besides electrical contact, each solder bump 403, after cooling, fulfils a mechanical fixing function thanks to a soldered joint between wettability area 411 and wettability area 412, i.e. indirectly between VCSEL laser emitter 401 and platform 402. Typically, the cooling temperature may be room temperature.
According to one aspect of the invention, each wettability area 411 of object 401 forms an angle of 70° to 110° with respect to each wettability area 412 of support 402. In the example in
Once again, imprecise terminology is used in order to make explanations simpler and for easier comprehension. In fact, the angle of 70° to 110°, in this case 90°, is actually formed by two straight lines which define, respectively, the main dimension of wettability areas 411, a vertical axis in this case, and the main dimension of wettability areas 412, a horizontal axis in this case. Consequently, object 401 is perpendicular to support 402, to the extent that the direction of the main dimension of wettability areas 411 is parallel to the direction of the main dimension of VCSEL laser emitter 401 and/or the direction of the main dimension of wettability areas 412 is parallel to the main direction of microelectronic platform 402.
Moreover, in the case of
Nevertheless, without extending beyond the scope of the invention, object 401 or support 402 may have less regular surfaces that are not parallel and not flat so that each wettability area of the object then forms any angle from 70° to 110° relative to each wettability area of the support. In such a case, the angle formed between a wettability area of the object and a wettability area of the support is generally different to the angles formed between the other wettability areas of the object and the other wettability areas of the support.
What is more, according to one aspect of the invention, object 401 and support 402 are mutually distant. In other words, as apparent in
Consequently, this aspect makes it possible to position the object relative to the support with greater accuracy than prior-art assemblies. An assembly in accordance with this invention is therefore capable of offering submicronic positional accuracy whereas prior-art assemblies only make it possible to achieve positioning with an accuracy of the order of several microns, as in the case of Document U.S. Pat. No. B-6,647,036. What is more, this accuracy is obtained relatively simply and inexpensively because the object is positioned relative to the support exclusively by surface tension.
If object 401 consists of a VCSEL laser emitter, the latter emits an inherently slightly conical laser beam 404 having an axis of symmetry which is perfectly parallel to the plane of platform 402. Such accuracy therefore allows the laser to transmit maximum power and/or information to other components such as an optical fibre. Laser beam 404 can then be processed in the same way as laser beam 204 shown in
As stated earlier,
Before doing so, in accordance with the method which is the subject of the invention, the steps illustrated in
Firstly, object 401 must be positioned a specific distance away from support 402 so that each solder bump 403 is placed substantially and partially facing the surface of each wettability area 411 of object 401 on the one hand and a corresponding surface of each wettability area 412 of support 402 on the other hand.
Then, the underbump metallisations must be heated to above the melting temperature of the solder material so as to move solder bumps 403 by surface tension so as to ensure cooperation between each solder bump 403 and one of wettability areas 411 of object 401 on the one hand and one of wettability areas 412 of support 402 on the other hand.
More precisely and according to the invention, the step to form solder bumps 403 on object 401 comprises a sequence of steps that involve initially depositing a sacrificial coating 413 on wettability areas 411 of object 401. This sacrificial coating 413 is relatively non-wetting in relation to the solder material and has a melting temperature higher than that of the solder material. In addition, sacrificial coating 413 extends asymmetrically over the main surface of each wettability area of object 401.
Then, holes must be drilled in sacrificial coating 413, each emerging on the surface of a wettability area 411 of object 401 and towards that part of wettability area 411 of object 401 which is opposite the closest edge of object 401. Thus, each hole is off-centred relative to the surface of the wettability area of the object on which it emerges and the bumps formed do not protrude beyond the edge of the object. One can also make provision for drilling several holes in the same wettability area.
Then, the underbump metallisations must be made by depositing solder material on sacrificial coating 413, as well as in said holes, and the underbump metallisations must be heated to above the melting temperature of the solder material so as to turn them, due to surface tension, into solder bumps 403 which completely or partially cover sacrificial coating 413.
Following this step, one removes sacrificial coating 413, for example by means of etching, so that each bump is then connected to a wettability area 411 via a stalk 414 originating from the solder material deposited in the hole. The stalk is therefore positioned on that part of the wettability area opposite the closest edge of the object. The “mushroom” formed by the bump and its stalk is therefore off-centred with respect to the main surface of wettability area 411.
Then, the edge of object 401 which is the closest to wettability area 411 must be cut in order to reduce one of the dimensions of the object. Such cutting ensures there is no contact between the object and the support in the resulting assembly.
Finally, one heats solder bumps 403 to above their melting temperature so as to completely cover each wettability area 411, with the periphery of solder bumps 403 protruding beyond the edge of object 401 obtained from the cutting step and bumps 403 covering wettability areas 401 of support 402 due to the effect of surface tension.
Alternatively but in a similar way, in the first embodiment of the method and the assembly which is the subject of the invention shown in
Unlike the assembly shown in
As well as bumps 503, the assembly in
To achieve this, bumps 516 must be made of a solder material that has a melting temperature substantially equal to the melting temperature of the material that constitutes solder bumps 503. In the example in
In this second embodiment of the invention, the step to form large bumps 503 on wettability areas 512 of support 502 is similar to that described in relation to
Note that small solder bumps 516 are formed using the same method as that used to form large solder bumps 503. When solder bumps 516 are in the state shown in
On completion of this step to position object 501 and after the step to cool the distinctive assembly of the method which is the subject of the invention, VCSEL laser emitter 501 is assembled on microelectronic platform 502 via solder bumps 503 which are attached to wettability areas 511 and 512, as shown in
In the example in
Since object 501 remains some distance away from support 502, i.e. there is no contact between them, positioning or alignment of object 501 relative to support 502 can be performed with greater accuracy than that obtainable with prior-art assemblies.
Also, given the spacing of solder bumps 503 in the step shown in
Note that here it is not necessary to off-centre the stalks of small bumps 516 on wettability areas 517. In fact, the spacing of small bumps 516 has no impact on the possibility of inserting object 501 between large bumps 503.
To ensure stable assembly of object 401 or 501 on support 402 or 502, it is preferable to make provision to firmly “clamp” the object between at least two pairs of solder bumps 403, 503. The term “pairs of solder bumps” should be construed as two bumps located facing each other and on either side of the object. It is therefore preferable to form at least three bumps distributed over two opposite faces of the object in order to ensure a certain degree of stability.
As an alternative to the embodiment shown in
In accordance with one aspect of the invention, object 801, once assembled by means of solder bumps 803, remains some distance away from support 802, in this case in the bottom of cavity 820. As explained earlier, this lack of contact between the object and support helps improve the accuracy with which the former is positioned on the latter.
In order to obtain such assembly, an embodiment of the method according to the invention must be used which includes a preliminary step involving producing cavity 820 in the support and where the step to position object 801 involves:
The height of the clearance between the lower edge of object 801 and the lower edge of cavity 820 depends on several parameters. These parameters include, firstly, the height of wettability areas 811 on object 801, the height of the centre of gravity of object 801, the quantity of solder material intended to form bumps 803 and the depth of cavity 820.
Obviously, these various parameters are determined depending on the desired clearance or distance between the lower edge of object 801 and the bottom of cavity 820. The term “lower edge” is used to denote the edge that is located at a lower height than if the assembly rested horizontally on support 802. In practice, the clearance between object 801 and support 802 is primarily determined so that laser beam 804 emitted by VCSEL laser emitter 801 propagates in the direction of an optical fibre 805 embedded in support 802.
Because of lack of contact between the object and support, object 801 can be positioned with far greater accuracy than that achievable with prior-art assemblies. This way one can make sure that laser beam 804 transmits maximum power to optical fibre 805. This embodiment of the assembly which is the subject of the invention does not require the use of a sacrificial coating, in contrast to the embodiments described above, when using the method of assembling object 801 and support 802.
As stated earlier, it is possible to make provision for an angle other than 90° between the wettability areas of the object and those of the support. Thus, in the assembly shown in
To implement such an assembly, it is preferable to form bumps 903 of different sizes in a single pair of bumps. In addition, the wettability zones of the object must be dimensioned and positioned asymmetrically, as shown in
a and 10b show two juxtaposed assemblies of VCSEL laser emitter 1001 and miniaturised optical component 1050. Miniaturised optical component 1050 is actually an optical chip intended to process the laser beam emitted by laser 1001 before it is guided into optical fibre 1005. The optical fibre is accommodated in V-shaped groove 1006 made in support 1002, in this case a microelectronic platform, said V-shaped groove 1006 making it possible to position the optical fibre precisely relative to the reference frame that constitutes platform 1002. Objects 1001 and 1050 are assembled with platform 1002 in accordance with the invention and, in particular, using a method analogous to that described in relation to
However, in
As can be seen in
Underbump metallisations made of solder material are produced in a known manner using conventional techniques which include depositing a metallised bonding layer, photolithography, removal of material by etching, electrolytic growth etc. Because all these techniques for forming underbump metallisations and hence solder bumps are familiar, their characteristics are not described in this document.
The only non-standard aspect of the formation of underbump metallisations in the method of assembling according to the invention involves depositing a layer of sacrificial coating and then making holes in it before applying the solder material to the substrate which may consist of a wafer of semiconductor material. This sacrificial coating is also produced using conventional techniques such as depositing a thin film by evaporation or spraying.
Moreover, if the initial substrate used is a wafer of semiconductor material, whether to produce solder bumps on the object or on the support, this substrate may comprise one or more electronic components and/or one or more sensors. This makes it possible to produce a complex system that fulfils multiple functions with a relatively high packing density.
An assembly such as those described above can be used, for example, to equip a transceiver system deployed in optical networks used to transfer data in the telecommunications sector.
What is more, although the examples explained in relation to the Figures relate mainly to mounting a VCSEL laser emitter, the invention is obviously not confined to such components and it can be used with many other objects and supports.
It can be used to mount MEMS chips or accelerometers. In the case of accelerometers, the invention is particularly advantageous for producing a sensor capable of measuring vibrations in three dimensions in space. This is achieved by assembling two accelerometers with a third accelerometer and using one of the methods which are the subject of the invention, along the three measuring axes. The invention thus makes it possible to implement an extremely accurate three-dimensional accelerometer.
Other implementations are possible without extending beyond the scope of this invention. It is possible to envisage an embodiment which is a hybrid of the embodiments shown in
Number | Date | Country | Kind |
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06.04984 | Jun 2006 | FR | national |