Number | Date | Country | Kind |
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7-170303 | Jun 1995 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5320706 | Blackwell | Jun 1994 | |
5516346 | Cadien et al. | May 1996 | |
5551986 | Jain | Sep 1996 |
Entry |
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Miyashita et al., "A New Post CMP Cleaning Method For Trench Isolation Process", First International Chemical-Mechanical Polish (C.M.P.) for VLSI/ULSI Multilevel Interconnection Conference (CMP-MIC), pp. 159-168, 1996. |