The present invention relates to techniques for direct conversion of carbon dioxide into carbon-based molecules.
With the concerns of increasing carbon dioxide (CO2) emission due to intensive human activities that require burning of fossil fuels, balancing the carbon cycle by maximizing the utilization of renewable energy has become an urgent priority. As such, various energy conversion technologies such as water-splitting electrolyzers have been developed to couple with renewable sources of energy like solar, wind, and hydro in order to meet the long-term global sustainability goals. To perform efficient CO2 utilization, one economically viable way is to couple electrochemical CO2 electrolyzers for renewable generation of value-added fuels and chemicals while achieving a net-zero carbon cycle.
To date, electrochemical CO2 reduction (CO2R) towards single carbon products, in particular CO, has made enormous progress, leading to production levels potentially suited for commercial usages. On the other hand, for multi-carbon (C2+) products such as C2H4 and C2H5OH, which are of particular interest owing to their high market value and flexibility in downstream applications, significant electrocatalyst activity and selectivity advancements are still needed. So far, copper (Cu) has been found to be the only single-metal catalyst known to electrocatalyze the conversion of CO2 to C2+ products and oxygenates at reasonably high rate and selectivity. Among Cu-based catalysts, those with high surface area are reported to be particularly interesting due to improved selectivity towards C2+ products at relatively low overpotentials, which could help to lower the energy costs for large-scale industrial applications. However, achieving high selectivity and formation rate towards C2+ product formation is difficult due to the complexity of the CO2R mechanism and diverging reaction pathways on Cu. Thus, a rational design of a catalyst system to enhance product selectivity is necessary to improve the overall catalytic performance and allow for real-world deployment.
Different strategies have been investigated to improve the overall electrocatalytic performance of Cu, such as alloy formation, surface doping, ligand modification, and interface engineering. Recently, the concept of tandem catalysis has attracted much attention due to the capability to sequentially facilitate multiple electrochemical conversions under a single reaction condition, presenting itself as an effective way to generate C2+ products. One commonly accepted tandem catalysis reaction pathway is the conversion from CO2-to-CO followed by CO-to-C2+, which are decoupled and facilitated sequentially over two different components in a single catalyst system, resulting in increased conversion to C2+ products compared to a single-component catalyst. For instance, bimetallic catalysts, such as Cu—Ag and Cu—Au, have been reported to behave as two phase-separated metals as opposed to a single-phase alloy to facilitate tandem catalysis. Effectively, the generation of CO over Ag or Au is reported to elevate the local CO availability near neighboring Cu, which then promotes CO—CO coupling via the CO spillover phenomenon. However, these bimetallic catalysts face challenges associated with potential in situ alloy formation depending on the dynamics of the metals employed and their miscibility leading to performance degradation.
There have also been investigations of tandem catalysis using a single catalyst, copper oxide-based nanoparticles, by co-feeding varying ratios of CO2 and CO, showing that the C2+ product formation is highly sensitive to the feed composition. Extended investigations of tandem catalysis have been made in which CO2 reduction is shown by using a mix of two catalysts, one being the CO producer and the other being the CO reducer, loaded on a carbon paper in an H-cell, observing enhancements in the production rate of C2H4 at the higher tested overpotential and higher copper oxide content in the electrode. The above two cases show that it is crucial to optimize the CO2/CO ratios to achieve the highest C2+ product formation in CO2RR. However, when using a single catalyst in CO2RR, it is particularly challenging to measure and control the local CO2/CO ratios due to the experimental limitation.
Herein is disclosed a process for converting carbon dioxide into a carbon-based molecule. The process includes applying a working voltage to a tandem electrocatalyst integrated with a gas diffusion electrode; providing a vapor-fed flow of the carbon dioxide to the tandem electrocatalyst integrated with the gas diffusion electrode; and catalyzing a direct-conversion reaction of the vapor-fed flow of the carbon dioxide to the carbon-based molecule using the tandem electrocatalyst integrated with the gas diffusion electrode.
The tandem electrocatalyst in one implementation consists of copper and nickel-coordinated nitrogen-doped carbon (NiNC), catalyzing the production of ethylene. The copper may be in the form of nanoparticles, nanocubes, nanotubes, nanoflowers, nanorods, or nanoplates.
More generally, the tandem electrocatalyst may be a nanostructure composed of 1) a copper-based binary or ternary alloy, and 2) a metal center coordinated to a) nitrogen-doped carbon (NC) or b) a NC-containing macrocyclic organic compound.
The copper-based binary or ternary alloy may be in the form Cu—X—Y, where each of X, Y is a transition or post-transition metals. For example, each of X, Y may be Ag, Zn, Al, or Sn. The Cu or copper-based binary or ternary alloy may be in the form of nanoparticles, nanocubes, nanotubes, nanoflowers, nanorods, or nanoplates.
The metal center may be composed of a transition or post-transition metal such as Fe, Co, Ni, Ag, Zn, Al, or Sn. The morphology of metal center coordinated to a NC (X—NC) may be in the form of nanoflowers, nanotubes, nanocages, mesopores, macropores, nanofibers, nanospheres, or other nanostructure
The macrocyclic organic compound may be porphyrins or phthalocyanines with modified ligands.
The carbon-based molecule may be ethylene, ethanol, acetate, or a straight chain hydrocarbon with at least three carbon atoms.
The process may be implemented using a membrane electrode assembly electrolyzer or using a flow electrolyte electrolyzer.
The invention in one aspect provides a sustainable process to convert carbon dioxide into value-added carbon-based molecules. In one example, a tandem electrocatalyst composed of copper nanocubes and nickel-coordinated nitrogen-doped carbon (NiNC), is integrated into gas diffusion electrodes (GDEs) for direct conversion of vapor-fed CO2 into ethylene.
Ethylene is particularly attractive due to its major importance as a feedstock for various applications including the polymer industry. As such, catalyst and electrolyzer developments are crucial to achieve industrially relevant ethylene production and efficiency levels. Here, we present a tandem electrocatalyst composed of copper nanocubes and nickel-coordinated nitrogen-doped carbon (NiNC), which is integrated into gas diffusion electrodes (GDEs) for direct conversion of vapor-fed CO2 into ethylene. Evaluation of tandem GDEs in the vapor-fed flow electrolyzer shows significantly increased ethylene selectivity in terms of faradaic efficiency (FE) and C2H4/CO ratio compared to a non-tandem copper GDE. The enhancements are attributed to the increased local CO availability near the copper surface via effective CO2 to CO conversion on neighboring NiNC. The experimental results are validated by 3-dimensional resolved continuum simulations, which shows increased flux of higher-order products with the added CO flux from NiNC. The practical viability of Cu/NiNC catalysts is further evaluated in a membrane electrode assembly electrolyzer, achieving 40% FE towards ethylene at 150 mA cm−2 and 3.2 V. These findings highlight the high selectivity and formation rate of ethylene achieved by successful device integration of Cu/NiNC catalysts, demonstrating the potential for implementation in large-scale sustainable CO2 electrolyzers.
Significant advantages are provided. The catalytic performance of these tandem catalyst-based CO2 electrolyzer shows higher energy conversion efficiencies towards ethylene and lower working voltages than the current ones on market and the literature data. The practical viability of Cu/NiNC catalysts is further evaluated in a membrane electrode assembly electrolyzer, achieving 40% FE towards ethylene at 150 mA cm-2 and 3.2 V. These findings highlight the high selectivity and formation rate of ethylene achieved by successful device integration of Cu/NiNC catalysts, demonstrating the potential for implementation in large-scale sustainable CO2 electrolyzers.
The preceding example relates to a specific example of catalyzing CO2 to ethylene reactions, but the same principles are more broadly applicable to other reactions, other catalysts and/or other catalyst-electrode geometries, with the common element in all cases being a tandem catalyst integrated with a gas diffusion electrode. Thus, more generally, the tandem catalyst comprises 1) copper, or a copper-based binary or ternary alloy, and 2) a metal center coordinated to a) nitrogen-doped carbon (NC) or b) a NC-containing macrocyclic organic compound.
The Cu-based binary or ternary alloy has the form Cu—X—Y, where X, Y are transition, or post-transition metals, such as Ag, Zn, Al, Sn, etc. The Cu or Cu-based alloys can be in the form of a nanostructure, such as nanoparticles, nanocubes, nanotubes, nanoflowers, nanorods, nanoplates, etc.
The metal center coordinated to the nitrogen-doped carbon (NC) can be a transition or post-transition metal, such as such as Ag, Zn, Al, Sn, etc. Examples include CoNC, FeNC, ZnNC, AgNC. The metal center can be coordinated to any NC-containing macrocyclic organic compounds, such as porphyrins, phthalocyanines, etc. with modified ligands. The morphology of X—NC can be in the form of nanoflowers, nanotubes, nanocages, mesopores, macropores, nanofibers, nanospheres, etc.
Reactions that can be facilitated by the tandem catalyst include but are not limited to:
In one aspect, the invention provides a process for converting carbon dioxide into a carbon-based molecule, the process comprising: applying a working voltage to a tandem electrocatalyst integrated with a gas diffusion electrode; providing a vapor-fed flow of the carbon dioxide to the tandem electrocatalyst integrated with the gas diffusion electrode; catalyzing a direct-conversion reaction of the vapor-fed flow of the carbon dioxide to the carbon-based molecule using the tandem electrocatalyst integrated with the gas diffusion electrode.
In one specific implementation, the tandem electrocatalyst consists of copper and nickel-coordinated nitrogen-doped carbon (NiNC), and the carbon-based molecule is ethylene. The copper may be in the form of nanoparticles, nanocubes, nanotubes, nanoflowers, nanorods, or nanoplates.
In various other implementations, the tandem electrocatalyst is a nanostructure composed of 1) a copper-based binary or ternary alloy, and 2) a metal center coordinated to a) nitrogen-doped carbon (NC) or b) a NC-containing macrocyclic organic compound.
The copper-based binary or ternary alloy may be in the form Cu—X—Y, where each of X, Y is a transition or post-transition metal. For example, each of X, Y may be Ag, Zn, Al, or Sn. The copper-based binary or ternary alloy may be in the form of nanoparticles, nanocubes, nanotubes, nanoflowers, nanorods, or nanoplates.
The metal center may be composed of a transition or post-transition metal. For example, the metal center may be Fe, Co, Ni, Ag, Zn, Al, or Sn.
The macrocyclic organic compound may be porphyrins or phthalocyanines with modified ligands.
The metal center coordinated to nitrogen-doped carbon (NC) or to a NC-containing macrocyclic organic compound may be in the form of nanoflowers, nanotubes, nanocages, mesopores, macropores, nanofibers, nanospheres, or other nanostructure.
The carbon-based molecule may be ethylene, ethanol, acetate, or a straight chain hydrocarbon with at least three carbon atoms. The process may be implemented using a membrane electrode assembly electrolyzer or a flow electrolyte electrolyzer.
In embodiments of the invention, increased ethylene formation during vapor-fed carbon dioxide reduction is achieved by employing tandem electrocatalyst consisting of nickel-coordinated nitrogen-doped carbon and cuprous oxide, which act as carbon monoxide generator and coupler, respectively. Performance evaluation was conducted in both flow electrolyte and membrane electrode assembly electrolyzers to demonstrate the potential for large-scale and direct carbon dioxide gas conversion into value-added chemicals.
A preferred embodiment of the invention provides a unique tandem gas diffusion electrode (GDE) comprising cuprous oxide nanocubes and Ni-coordinated N-doped carbons (NiNC). Described herein is also the evaluation of tandem catalysis under direct CO2 gas reduction by employing both vapor-fed flow electrolyte and membrane electrode assembly (MEA) electrolyzers. The Cu/NiNC-catalyst-loaded GDEs provide substantially increased mass transport that enables high product formation rates. Due to the different physicochemical properties of the two materials, we observed enhanced selectivity towards the formation of C2H4 during CO2R while mitigating mixing of the two under CO2 reduction conditions. Because NiNC is an excellent CO production catalyst, it significantly increases the local availability of CO near the Cu sites to promote increased C—C coupling. In fact, the tandem Cu/NiNC GDE exhibits significantly higher selectivity and production rate towards the formation of C2H4 at lower overpotentials compared to the Cu-only GDE in the vapor-fed flow electrolyzer. Additionally, resolved 3-dimensional continuum simulations are performed to demonstrate the qualitative enhancement of C2+ product formations on GDEs with varying ratios of Cu and NiNC, showing that the increased internal CO concentration with higher loadings of NiNC leads to an increased C2+ flux. Lastly, the tandem GDE is evaluated in an MEA electrolyzer, demonstrating a very respectable energy efficiency towards C2H4, among the highest reported for direct CO2-to-ethylene conversion in the literature.
A uniform catalyst layer of Cu/NiNC GDE is composed of as-prepared CuxO nanocubes and NiNCs produced by thorough mixing during GDE fabrication as shown from top view in the SEM image in
The energy-dispersive spectroscopy (EDS) elemental maps of Cu and Ni shown in
The electrocatalytic performance of Cu/NiNC and Cu GDEs are evaluated in a vapor-fed CO2 flow electrolyzer using 1 M KOH as the electrolyte (
In addition to the higher FEs, the tandem electrode is also found to exhibit higher partial current density (PCDgeo, current normalized by the geometric area of the electrode) towards the formation of C2H4 at all tested potentials as shown in
In addition to the FEs and PCDs discussed above, the tandem effect is demonstrated in terms of Cu-mass-normalized CO2 consumption rate towards C2H4 and uncoupled CO as shown in
In attempts to maximize the local CO availability, tandem GDEs with varying ratios of Cu and NiNC are fabricated and evaluated (
C—C bond formation on pure Cu catalysts has been a major area of investigation both experimentally and computationally. Pathway 300 through CO—CO coupling can occur on all of our studied catalysts, including pure Cu and tandem Cu/NiNC. It is well known that establishing a higher local concentration of CO at the interface can expedite the C—C coupling process. It is here where our vapor-fed, tandem catalyst system can result in greater efficacy. Specifically, the NiNC catalyst generates CO nearly exclusively near the Cu surface, which makes use of the greater CO concentration to produce C2H4, as depicted in pathway 302. Mechanistically, Langmuir-Hinshelwood (LH) and Eley-Rideal (ER) pathways have been proposed. Generally, it is believed that Cu favors surface adsorbed CO to facilitate CO—CO coupling, either forming OC—CO* or OC—CO*, through the LH reaction pathway. However, there is likely a competitive adsorption of CO2 and CO on Cu surfaces during reaction, which can potentially impede coupling between two neighboring CO molecules. On the other hand, the ER reaction pathway allows for C—C coupling between an adsorbed CO and a solvated CO at the outer Helmholtz layer, avoiding competition for adsorption sites for CO intermediates. While our results cannot elucidate which of these two is dominant, it is clear that the local concentrations of CO at the interface can improve the kinetics of C—C coupling. Additionally, the vapor-fed reaction environment from using GDEs in this work circumvents the need to co-feed CO as the solvated CO is sufficiently generated from CO2R on NiNC. A possible bifunctional mechanism involving both Cu and Ni catalyst sites cannot be completely disregarded either, however, further investigation through in-situ electrochemical probing would help identify reaction intermediates and mechanisms at play. Below, we present computational modeling that reveals increased transport of CO to the Cu surface in the tandem system compared to the Cu only system.
To further elucidate the underlying mechanism of the tandem catalysis process, we perform mass transfer simulations using STAR-CCM+ with varying ratios of Cu and NiNC to examine the CO2RR product distributions in the microenvironment near the catalyst surfaces. Here, we study the flux of two species, 1) CO and 2) higher-order products, denoted as “P”, on a model system designed to elucidate potential mass transfer mechanisms involved the tandem system.
By simulating only a periodic sector of azimuth angle θ with a single Cu particle, the number of Cu particles is then varied by changing θ from 0 to 2π—in other words, there are 2π/θ Cu particles. In this model, the NiNC is assumed to produce only CO with a flux J, and the Cu is assumed to be perfectly adsorbing for CO. Additionally, we assume that the flux of P from Cu has two contributions: (1) P is produced with a flux equal to the rate of consumption of CO, i.e. the “tandem effect” (Cu reacts with CO generated from NiNC to form P) and (2) P is produced with a flux J, since Cu also produces CO, and we assume that this is immediately converted to P.
In
To further demonstrate the practical utilization of the tandem catalysis, the performance of the Cu/NiNC GDE is evaluated as the cathode in a MEA electrolyzer as shown in
Unlike in the vapor-fed flow electrolyzer demonstrated in the above section, the MEA uses a solid polymer-based membrane as the electrolyte, which is compressed between the cathode and the anode, which helps to improve energy efficiency with significantly lower single-cell voltages for potential commercial CO2 electrolyzer applications. At the applied current densities of 100 to 150 mA cm−2, the Cu/NiNC tandem electrode in the MEA shows 3.0 and 3.2 V (non-iR compensated), respectively, with negligible voltage degradation over a total of one hour testing (
In summary, we have successfully demonstrated a highly selective ethylene formation at low overpotentials using a non-alloy tandem catalyst made from cuprous oxide nanocubes combined with nickel-containing nitrogen-doped carbon (NiNC) in a vapor-fed CO2 electrolysis system. Based on the product analysis, a significantly enhanced Faradaic efficiency of ethylene is achieved, resulting in 55% FE at −0.6 V vs. RHE compared to 30% obtained with the electrode made from only cuprous oxide. Additionally, a 4.5 times higher C2H4/CO selectivity ratio was observed, demonstrating a higher utilization of CO. Through varying the Cu and NiNC ratio, ethylene selectivity is maximized, which is attributed to the increased local CO coverage near the Cu surface by CO that is readily produced by NiNC. As a result, CO utilization was improved substantially for C—C coupling, as indicated by low CO partial current densities in the potential range where high ethylene partial current densities are observed. To corroborate experimental observations, 3-dimensional continuum simulations were performed, verifying that CO generated from NiNC increases the CO flux to the Cu surfaces, thereby increasing CO concentration to for greater production of multi-carbon products. Furthermore, we demonstrated the practical feasibility of the tandem electrode performing CO2 conversion in a membrane electrode assembly (MEA), resulting in ethylene FE of 40% at 3.2 V cell voltage compared to 36% obtained with the Cu only electrode. Both the experimental and computational results provided in this study highlight the advantages of a tandem catalysis scheme based on Cu combined with a non-metallic CO promoter, NiNC, for the formation of ethylene. Tandem approaches can help accelerate the implementation of large-scale CO2 electrolyzers in the energy grids.
The synthesis of polyacrylonitrile (PACN)-based catalysts may use procedures in published literature. In one example, the synthesis of polymer particle, the polymerization reaction of 2 mL acrylonitrile (2 mL) is initialized by 2 mg azobisisobutyronitrile and Ni(NO3)2·6H2O in 2 mL acetone at 70° C. under N2 atmosphere for 12 h. Then the solution was vacuum dried and the powdered Ni-PACN was collected. The generated powder was heated in air at 230° C. for 2 h at a heating rate of 0.1° C./min. After that, the powder is further heated in N2 at 900° C. at a heating rate of 5° C./min. The final product is black Ni-PACN catalyst.
In another example, the synthesis process of 30 nm Cu2O nanocubes is performed using slight modifications to a published procedure. Typically, 1.152 g SDS (sodium dodecyl sulfate) powder is added to 181.2 mL water in a vial. After the solution is well mixed, 2 mL 1 M Cu2SO4 is added into the continuously stirring SDS solution. 0.8 mL 1 M NaOH is added to solution and consequently, Cu(OH)2 is generated. A 16 mL 0.2 M sodium ascorbate solution is quickly injected into the Cu(OH)2 solution. We allowed the solution to stir for 5 min, followed by aging for 10 minutes (no stirring) as color turns from light yellow to bright yellow. The solution is then centrifuged at 12000 RPM for 10 min and the resulting orange yellow powder is collected. The precipitate is washed twice with 20 mL 1:1 volume ratio of ethanol and water.
To prepare tandem catalyst layer with different weight ratio (1:0.5, 1:1 and 1:2), 1.87 mg Cu2O powder and different amount of Ni-PACN (0.935 mg, 1.87 mg, and 3.74 mg) with 4 ul Nafion (5 wt %) solution were dispersed in 1:1 H2O:EtOH solution. The solution is sonicated for 1 h. The solution was spray-coated onto a gas diffusion layer (1.3×2.5 cm2, Sigracet 39BC) which is heated at 70° C. Finally, the catalyst layer is annealed in the oven to evaporate remaining solvent.
Catalyst coated electrodes were tested in a custom-built 3-compartment cell, in which a third chamber was added behind the typical catholyte chamber of the two-compartment electrochemical cell reported previously as shown in
To prepare the cathode (1 cm2), the same GDE as in the flow cell was used to spray an overlayer of the Sustainion ionomer (Dioxide Materials) with a loading of 0.05 mg cm−2 to improve contact with the solid electrolyte membrane. IrOx GDE (Dioxide Materials) and Sustainion membrane (Dioxide Materials) activated in 1 M CsOH were used as the anode (1 cm2) and membrane (˜4.5 cm2), respectively. A commercial MEA cell assembly (Fuel Cell Technologies) was used to compress the MEA at 30 N m. The MEA electrolyzer testing was performed at room temperature with 30 sccm CO2 gas (99.999% Airgas) fed through a room temperature humidifier. The chronopotentiometry measurements were performed by holding the applied current for at least 6 minutes before stepping to the next current. Gas products from the MEA cell were quantified by injecting the outlet stream at the 5-minute mark of each applied current.
Carbon dioxide was provided to the electrochemical cell and its flow rate was controlled with a flow controller. The dry carbon dioxide stream could be supplied as dry gas. Effluent gas from the vapor-fed working electrode compartment was fed to a gas chromatograph (SRI Instruments), and two gas chromatograph injections were taken per electrode potential for product quantification to determine Faradaic efficiencies. After electrochemical measurements, the liquid electrolyte was collected and tested by 1H nuclear magnetic resonance spectroscopy (NMR; Varian Inova 600 MHz) to quantify selectivity towards liquid-phase products. To calculate faradaic efficiencies and current densities, measurements were taken 3 times to ensure repeatability for catalyst synthesis and CO2 reduction testing of all tandem GDEs at each electrode potential.
The energy efficiency (EE) was calculated using the following equation:
where E0product is the thermodynamic equilibrium potential of a product, FEproduct is the faradaic efficiency of a product, and Ecell is the measured cell voltage between the cathode and the anode.
Simulations of mass transfer are performed using STAR-CCM+ (Siemens). The simulation domain consists of a periodic sector of a cylinder of radius 400 nm and height 10 μm with NiNC and Cu2O particles (100 and 30 nm radius, respectively) on the bottom. As described previously, the angle of the sector is varied to vary the Cu2O:NiNC ratio. The concentrations of species i∈{CO, P} are governed by the steady diffusion equation
∇2Ci=0.
On the NiNC particle surface, we have the following boundary conditions,
where J is assumed to be 1×10−6 kmol m−2 s−1 and the diffusivities D of both CO and P are assumed to be both equal to 1×10−9 m2 s−1. However, it is important to note that the specific values chosen do not ultimately affect the dimensionless trends. On the Cu2O particle surface, we have the following boundary conditions,
On the gas-liquid interface of the cylinder, the species are assumed to be perfectly adsorbing into the gas stream, i.e.,
Ci=0.
On the periphery of the cylinder, no flux is assumed, i.e., ∇Ci·n=0, and at the top of the cylinder, far away from the catalyst particles and gas liquid interface, there is assumed to be no species Ci=0. Care is taken to select a simulation domain that is large enough—both in radius and in height—such that nearly all of the produced species leaves through the gas-liquid interface. The averaged dimensionless flux through the gas-liquid interface is calculated as
where A is the surface area of the gas-liquid interface.
Catalyst GDEs were characterized ex situ by scanning electron microscopy (SEM; FEI Magellan 400 XHR, 5 kV), X-ray Photoelectron Spectroscopy (XPS; PHI Versaprobe 3 with Multipak data processing), and Grazing incidence (GI)-XRD diffraction (X'Pert Pro PANalytical Materials Research diffractometer). The SEM images and EDS results of the Cu2O, Cu2O/NiNC and NiNC gas diffusion electrodes were obtained using the EDAX/Ametek TEAM EDS system with an Octane Plus detector on a ThermoFisher Helios 6001 FIB/SEM operated at 15 KV. When taking SEM images, we used a 5 kV electron beam with 21 pA. The X-ray Photoelectron Spectroscopy (XPS) spectra were collected by a PHI Versaprobe 3 Scanning XPS Microscope with Multipak data processing. Grazing incidence (GI)-XRD (ω=1°) characterization of gas diffusion layer (GDL), Cu2O (pre- and post-experimental) GDE, and Cu2O/NiNC (pre- and post-experimental) GDE was performed using an X'Pert Pro PANalytical Materials Research diffractometer with a Cu Kα (λ=0.154 nm) x-ray source. All samples were fixed on a standard glass slide substrate holder for XRD measurements. Diffractograms were collected at a step size of 0.03° or 0.05° and a time per step of 1 s. The beam mask and divergence slit were varied to maximize the x-ray spot size while maintaining ω=1°.
Top-view and cross-section SEM images are shown in
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/US2023/015255 | 3/15/2023 | WO |
| Number | Date | Country | |
|---|---|---|---|
| 63320084 | Mar 2022 | US |