Claims
- 1. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers that spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers.
- 2. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said bonding step comprising: a first bonding step, to be performed between said energy generating part forming step and said removal step, wherein a first main body half pre-formed with a first pressure chamber half for spouting ink is bonded onto said vibrating layer; and a second bonding step wherein a second main body half pre-formed with a second pressure chamber half for spouting ink is bonded to said first main body half after said removal step.
- 3. The ink jet recording head production method as claimed in claim 2, said energy generating part forming step comprises a dividing step wherein the individual electrodes are formed by dividing said individual electrode layer at the forming position of said ink jet energy generating part after said individual electrode layer is formed and before said energy generating layer is formed.
- 4. The ink jet recording head production method as claimed in claim 2, wherein said energy generating part forming step comprises a dividing step wherein both said individual electrode layer exposed in said opening part and said energy generating layer are divided at the forming position of said ink jet energy generating part after said removal step is finished.
- 5. The ink jet recording head production method as claimed in claim 2 wherein said energy generating part forming step comprises a dividing step wherein the individual electrodes are formed by dividing only said individual electrode layer exposed in said opening part at the forming position of said ink jet energy generating part after said removal step is finished.
- 6. The ink jet recording head production method as claimed in claim 2, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 7. The ink jet recording head production method as claimed in claim 2, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 8. The ink jet recording head production method as claimed in claim 2, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 9. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said energy generating part forming step comprises a dividing step wherein individual electrodes are formed by dividing said individual electrode layer is divided as a forming position of said ink jet energy generating part after said individual electrode layer is formed and before said energy generating layer is formed.
- 10. The ink jet recording head production method which provides the dividing position to perform said dividing process in said dividing step at in between adjacent said pressure chambers in the ink jet recording head production method as claimed in claim 9.
- 11. The ink jet recording head production method as claimed in claim 9, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 12. The ink jet recording head production method as claimed in claim 9, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 13. The ink jet recording head production method as claimed in claim 9, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 14. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said energy generating part forming step comprises a dividing step wherein the individual electrodes are formed by dividing both said individual electrode layer exposed in said opening part and said energy generating layer at the forming position of said ink jet energy generating part after said removal step.
- 15. The ink jet recording head production method which provides the dividing position to perform said dividing process in said dividing step at in between adjacent said pressure chambers in the ink jet recording head production method as claimed in claim 14.
- 16. The ink jet recording head production method as claimed in claim 14, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 17. The ink jet recording head production method as claimed in claim 14, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 18. The ink jet recording head production method as claimed in claim 14, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 19. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said energy generating part forming step comprises a dividing step wherein the individual electrodes are formed by dividing only said individual electrode layer exposed in said opening part at the forming position of said ink jet energy generating part after said removal step is finished.
- 20. The ink jet recording head which form said ink jet energy generating part over a plurality of said pressure chambers in said energy generating part forming step in the production method of the ink jet recording head described in claim 19.
- 21. The ink jet recording head production method which provides the dividing position to perform said dividing process in said dividing step at in between adjacent said pressure chambers in the ink jet recording head production method as claimed in claim 19.
- 22. The ink jet recording head production method as claimed in claim 19, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 23. The ink jet recording head production method as claimed in claim 8, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 24. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; an individual electrode forming step wherein the individual electrodes are formed in the corresponding position of said ink jet energy generating part via said opening part, after said removal step is finished; and a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer.
- 25. The ink jet recording head production method as claimed in claim 24, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 26. The ink jet recording head production method comprising:an individual electrode forming step wherein an individual electrode layer is formed on the base plate using the thin film forming technology; an individual energy generating layer forming step wherein an individual energy generating layer is formed at least on said individual electrode layer; a filling step wherein a filing material is provided in gaps between said individual energy generating layers formed in said individual energy generating layer forming step; an energy generating part forming step wherein the ink jet energy generating part is formed by performing a vibrating layer forming step wherein a vibrating layer is formed on said energy generating layer and said filling material after said filling step is finished; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing at least an part corresponding to deforming portion of said ink jet energy generating part of said base plate; and a bonding step wherein a main body pre-formed with pressure chambers to spout ink and said vibrating plate are bonded.
- 27. The ink jet recording head production method as claimed in claim 26, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 28. The ink jet recording head production method as claimed in claim 26, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 29. The ink jet recording head production method as claimed in claim 26, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 30. The ink jet recording head production method comprising:an individual electrode forming step wherein an individual electrode layer is formed on the base plate using the thin film forming technology; an individual energy generating layer forming step wherein an individual energy generating layer is formed at least on said individual electrode layer; a filling step wherein a filing material is provided in gaps between said individual energy generating layers formed in said individual energy generating layer forming step; an energy generating part forming step wherein the ink jet energy generating part is formed by performing a vibrating layer forming step wherein a vibrating layer is formed on said energy generating layer and said filling material after said filling step is finished; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing at least an part corresponding to deforming portion of said ink jet energy generating part of said base plate; and a bonding step wherein a main body pre-formed with pressure chambers to spout ink and said vibrating plate are bonded, wherein the filling material uses the same material as said base plate.
- 31. The ink jet recording head production method as claimed in claim 30 wherein said filling material uses a material that has elastic and anti-ink properties.
- 32. The ink let recording head production method as claimed in claim 30, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 33. The ink jet recording head production method as claimed in claim 30, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 34. The ink jet recording head production method as claimed in claim 30, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 35. The ink jet recording head production method comprising:an individual electrode forming step wherein an individual electrode layer is formed on the base plate using the thin film forming technology; an individual energy generating layer forming step wherein an individual energy generating layer is formed at least on said individual electrode layer; a filling step wherein a filling material is provided in gaps between said individual energy generating layers formed in said individual energy generating layer forming step; an energy generating part forming step wherein the ink jet energy generating part is formed by performing a vibrating layer forming step wherein a vibrating layer is formed on said energy generating layer and said filling material after said filling step is finished; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing at least an part corresponding to deforming portion of said ink jet energy generating part of said base plate; and a bonding step wherein a main body pre-formed with pressure chambers to spout ink and said vibrating plate are bonded, wherein said filling material uses a material whose Young's modulus is smaller than the material of said energy generating layer, less than 90 GPa.
- 36. The ink jet recording head production method as claimed in claim 35 wherein said filling material uses a material that has elastic and anti-ink properties.
- 37. The ink jet recording head production method as claimed in claim 35, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 38. The ink jet recording head production method as claimed in claim 35, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 39. The ink jet recording head production method as claimed in claim 35, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 40. The ink jet recording head production method comprising:an individual electrode forming step wherein an individual electrode layer is formed on the base plate using the thin film forming technology; an individual energy generating layer forming step wherein an individual energy generating layer is formed at least on said individual electrode layer; a filling step wherein a filling material is provided in gaps between said individual energy generating layers formed in said individual energy generating layer forming step; an energy generating part forming step wherein the ink jet energy generating part is formed by performing a vibrating layer forming step wherein a vibrating layer is formed on said energy generating layer and said filling material after said filling step is finished; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing at least an part corresponding to deforming portion of said ink jet energy generating part of said base plate; and a bonding step wherein a main body pre-formed with pressure chambers to spout ink and said vibrating plate are bonded, wherein said filling material uses a material that has elastic and anti-ink properties.
- 41. The ink jet recording head production method as claimed in claim 40, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 42. The ink jet recording head production method as claimed in claim 40, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 43. The ink jet recording head production method as claimed in claim 40, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 44. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said removal step is performed after said bonding step is finished.
- 45. The ink jet recording head production method as claimed in claim 44, an ink jet recording head production method wherein said nozzle plate installation step is performed before said bonding step.
- 46. The ink jet recording head production method as claimed in claim 44, an ink jet recording head production method where in said nozzle plate installation step is performed after said bonding step.
- 47. In the ink jet recording head production method as claimed in claim 44, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 48. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said nozzle plate installation step is performed before said bonding step.
- 49. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, wherein said nozzle plate installation step is performed after said bonding step.
- 50. An ink jet recording head production method comprising:an energy generating part forming step wherein the ink jet energy generating part is formed by sequentially forming an individual electrode layer, an energy generating layer and a vibrating layer on a base plate using the thin film forming technology; a removal step wherein said ink jet energy generating part is exposed from said base plate by forming an opening part by removing an part corresponding to at least a deforming portion of said ink jet energy generating part of said base plate; a bonding step wherein the main body including pre-formed pressure chambers to spout ink is bonded to said vibrating layer; and a nozzle plate installation step wherein a nozzle plate is provided to said main body while forming a nozzle hole which spouts ink at a position corresponding to said pressure chambers, further comprising a heat dissipation part forming step wherein a high heat conductivity material is provided to the opening part formed in said base plate after said removal step.
- 51. An ink jet recording head that comprises a pressure chamber and a piezoelectric element and that spouts ink from said pressure chamber by deforming said piezoelectric element by electrical signals, an ink jet recording head that uses a piezoelectric element formed by a growth step wherein said piezoelectric element is grown on a base plate using the thin film forming technology and a removal step wherein a portion of the base plate corresponding to deforming portion of said piezoelectric element is removed while leaving the base plate at the peripheral of the deforming part of said piezoelectric element.
- 52. A printer apparatus that is provided with an ink jet recording head that comprises a pressure chamber and a piezoelectric element and that spouts ink from said pressure chamber by deforming said piezoelectric element by electrical signals, a printer apparatus that uses a piezoelectric element formed by the growth step wherein said piezoelectric element is grown on a base plate using the thin film forming technology and the removal step wherein a portion of the base plate corresponding to deforming portion of said piezoelectric element is removed while leaving the base plate at the peripheral of the deforming part of said piezoelectric element.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-297919 |
Oct 1998 |
JP |
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Parent Case Info
This application is a continuation of international application PCT/JP99/01570 filed on Mar. 26, 1999.
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Continuations (1)
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Number |
Date |
Country |
Parent |
PCT/JP99/01570 |
Mar 1999 |
US |
Child |
09/807430 |
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US |