Manufacturing method of organic thin-film transistors and equipment for manufacturing the same

Abstract

To increase productivity of organic thin-film transistors, in an organic thin-film transistor manufacturing equipment, a liquid containing at least either one of a wiring material and a semiconductor material is coated on a substrate to form a number of organic thin-film transistors. Substrate carrying means carry the substrate. The substrate is heated by a first heating means, and the temperature of the substrate is controlled by a controller. The liquid containing at least either one of the wiring material and the semiconductor material is heated by a second heating means, and the temperature of this liquid is controlled also by the controller.

Description

BRIEF DESCRIPTIONS OF THE DRAWINGS

FIG. 1 is a system diagram of one embodiment of an equipment that manufactures an organic thin-film transistor according to the present invention;

FIG. 2 is a flowchart of an organic thin-film transistor manufacturing process according to the present invention;

FIG. 3 is a plan view of a substrate where a plurality of organic thin-film transistors are disposed according to the present invention;

FIG. 4 is a plan view of a substrate where a plurality of organic thin-film transistors are disposed according to the present invention;

FIG. 5 is a plan view of a substrate where a plurality of organic thin-film transistors are disposed according to the present invention;

FIG. 6A is a detailed vertical cross-section view of the organic thin-film transistor shown in FIG. 1;

FIG. 6B is a plan view of the organic thin-film transistor shown in FIG. 1;

FIG. 7 is a detailed flowchart of a process of step 120 shown in FIG. 2;

FIG. 8 is a system diagram of one embodiment of an apparatus that forms a source electrode and a drain electrode according to the present invention; and

FIG. 9 is a detailed flowchart of a process of step 130 shown in FIG. 2.

Claims

1. An organic thin-film transistor manufacturing equipment which applies to coat a liquid containing at least either one of a wiring material and a semiconductor material on a substrate to form a number of organic thin-film transistors on the substrate, wherein a substrate carrying means that carries the substrate; a first heating means that heats the substrate; a substrate temperature controlling means that controls a temperature of the substrate heated by the first heating means; a second heating means that heats the liquid containing at least either one of the wiring material and the semiconductor material; and a liquid temperature controlling means that controls a temperature of the liquid heated by the second heating means are included.

2. The organic thin-film transistor manufacturing equipment according to claim 1, wherein the substrate temperature controlling means generates a thermal gradient in a direction in which the substrate is carried, and causes the substrate to be heated so that a temperature on a forward side in a substrate carrying direction is higher than a temperature on a backward side in the substrate carrying direction.

3. The organic thin-film transistor manufacturing equipment according to claim 1, wherein the first heating means is disposed on a back surface side of a liquid-coated surface of the substrate.

4. The organic thin-film transistor manufacturing equipment according to claim 1, further comprising a forming apparatus that forms a drain electrode on the substrate, wherein the substrate carrying means carries the substrate in a direction approximately orthogonal to a longitudinal direction of the drain electrode formed by the forming apparatus.

5. The organic thin-film transistor manufacturing equipment according to claim 1, wherein the substrate carrying means has a plurality of rollers, and heating means is provided to at least one of the plurality of rollers.

6. The organic thin-film transistor manufacturing equipment according to claim 3, further comprising temperature measuring means capable of measuring temperatures of at least two points on the substrate, and the temperature measuring means is disposed at a position where a temperature of at least one of the organic thin-film transistors formed on the substrate can be measured.

7. The organic thin-film transistor manufacturing equipment according to claim 5, further comprising temperature measuring means capable of measuring temperatures of at least two points on the substrate, and the temperature measuring means is disposed at a position where a temperature of at least one of the organic thin-film transistors formed on the substrate can be measured.

8. An organic thin-film transistor manufacturing method comprising: a substrate carrying step of carrying a substrate to a predetermined position;and a liquid layer coating step of coating the substrate with a liquid containing at least either one of a wiring material and a semiconductor material to be performed after the substrate carrying step,wherein a temperature of the substrate is heated to a predetermined temperature in both the substrate carrying step and the liquid layer coating step.

9. The organic thin-film transistor manufacturing method according to claim 8, wherein the liquid layer coating step includes a liquid coating step and a substrate heating step, and a substrate carrying speed in the liquid coating step and a substrate carrying speed in the substrate heating step are approximately equal to each other.