Number | Name | Date | Kind |
---|---|---|---|
3861798 | Kobayashi et al. | Jan 1975 | |
3867038 | Westell | Feb 1975 | |
4097750 | Lewis et al. | Jun 1978 | |
4200395 | Smith et al. | Apr 1980 | |
4371264 | Lacombat et al. | Feb 1983 | |
4664524 | Hattori et al. | May 1987 |
Entry |
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M. A. van den Brink, et al., SPIE 772, Optical Microlithography VI (1987), "Performance of a wafer stepper with automatic intra-die registration correction". |
D. Post, Optical Engineering, May/Jun. 1982, vol. 21, No. 3, pp. 458-467, "Developments in moire interferometry". |
F. M. Gerasimov, Applied Optics, vol. 6, No. 11, Nov. 1967, pp. 1861-1865, "Use of Diffraction Gratings for Controlling a Ruling Engine". |