Number | Name | Date | Kind |
---|---|---|---|
3566960 | Stuart | Aug 1969 | |
4139051 | Jones et al. | Feb 1979 | |
4261762 | King | Apr 1981 | |
4282924 | Faretra | Aug 1981 | |
4453080 | Berkowitz | Jun 1984 | |
4457359 | Holden | Jul 1984 | |
4458746 | Holden et al. | Jul 1984 | |
4491173 | Demand | Jan 1985 |
Entry |
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King et al., "Experiments on Gas Cooling of Wafers," Nucl. Instrum. Methods, 189 (1981) pp. 169-173. |
Hammer, "Cooling Ion Implantation Target," IBM Technical Disclosure Bulletin, vol. 19, No. 6, Nov. 1976, pp. 2270-2271. |
Mack, "Wafer Cooling in Ion Implantation," Ion Implantation: Equipment and Techniques, Proc. Fourth Int. Conf., Sep. 1982, (Springer-Verlag, 1983), pp. 221-233. |
Model 80-10 High Current Ion Implantation System Brochure, Varian/Extrion Division, Feb. 1982. |