Number | Name | Date | Kind |
---|---|---|---|
4312117 | Robillard et al. | Jan 1982 | |
4802952 | Kobori et al. | Feb 1989 | |
4808549 | Mikkor et al. | Feb 1989 | |
4908693 | Nishiguchi | Mar 1990 | |
5164339 | Gimpelson | Nov 1992 | |
5314572 | Core et al. | May 1994 |
Entry |
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"Surface Micromachined, Digitally Force-Balanced Accelerometer With Integrated CMOS Detection Circuitry," Yun, et al., IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 22-25, 1992. |
"Large Displacement Linear Actuator," Brennen, et al., IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 4-7, 1990. |