This disclosure relates to a method of producing a component carrier for an electronic component, a method of producing a radiation arrangement and to the component carrier and/or the radiation arrangement.
Requirements are often placed on component carriers, for example, housings for electronic components, for example, radiation arrangements, for example, LEDs, that the LEDs are simple to contact, that the heat generated in the LEDs during operation can be transported away rapidly and effectively, and that the overall radiation arrangement consisting of the LED and the component carrier is simple and economical to produce. In conventional component carriers, besides other concepts, two different construction concepts are known in particular for component carriers.
For example, it is known to form a carrier body from ceramic and provide this with electrical contacts which extend on the surface of the carrier body and partially through the carrier body. One of the electrical contacts may have such a large area that the electronic component can be placed on the electrical contact. An LED, for example, a thin-film LED and/or a vertical LED (emission direction and/or current conduction perpendicular to the layer structure), may be fastened to the electrical contact such that it is fixed on the electrical contact and, at the same time, electrical contacting is provided via the physical contact. A further contact of the LED may be contacted with the other electrical contact of the component carrier, for example, by a bond connection. The carrier body made of ceramic electrically insulates the electrical contact on which the electronic component is fastened, and dissipates heat from the electronic component. For further dissipation of heat from the component carrier, a metallization may be formed on the carrier body on an opposite side of the ceramic carrier body from the electronic component. The metallization may, for example, also be used to produce a solder connection.
The component carrier comprising the ceramic carrier body may be placed on a printed circuit board, for example, on an FR4 printed circuit board such that the carrier body lies between the electronic component and the printed circuit board. The electrical contacts extending through the ceramic carrier body connect to conductor tracks of the printed circuit board. Furthermore, the metallization connects to thermal lines which extend through the printed circuit board and can connectto a heat sink. The printed circuit board contributes to good, simple and economical contacting and cooling of the electronic component.
Alternatively, it is known to use an electrically conducting lead frame section, for example, comprising metal for the component carrier. This can be produced particularly simply and economically. For example, the lead frame section may be part of a lead frame and the component carrier may be produced in a component carrier assembly by processing all the lead frame sections of the lead frame in the assembly. If a vertical LED is now used as the electronic component, as described above, then the lead frame section electrically contacts the electronic component and an electrical connection is established between the electronic component and the heat sink. Since the electronic component and the heat sink should not be electrically coupled to one another in many applications, a metal-core printed circuit board is, for example, used to fasten the component carrier, the metal core of the printed circuit board being insulated from the electrical contacts of the printed circuit board by a dielectric layer. The metal core of the metal-core printed circuit board may be used as a heat sink, and/or an additional heat sink thermally coupled to the metal core may be provided. The dissipation of heat from the radiation arrangement comprising the component carrier and the LED to the heat sink takes place via the dielectric layer of the metal-core printed circuit board.
Alternatively, it is possible to use an electronic component, for example, a horizontal LED (emission direction and/or current conduction parallel to the layer structure) in which no electrical contact is established between the electronic component and the lead frame section merely by the fastening on the lead frame section. Both electrical contacts of the electronic component may then, for example, be established by bond connections. Furthermore, an FR4 printed circuit board may be used to connect the component carrier to the heat sink.
We provide a method of producing a component carrier for an electronic component including: a lead frame section including an electrically conductive material, the lead frame section having a first contact section that forms a first electrical contact element, a second contact section that forms a second electrical contact element, and a reception region that receives the electronic component, at least the reception region and the second contact section being electrically conductively connected to one another, a thermally conductive and electrically insulating intermediate element that dissipates heat from the reception region and electrically insulates the reception region formed at least on an opposite side of the lead frame section from the reception region, and a thermal contact that thermally contacts the electronic component formed at least on a side of the intermediate element facing away from the reception region.
We also provide a method of producing an electronic arrangement including producing a component carrier according to the method of claim 17, applying the electronic component onto the reception region, contacting a first electrical contact of the electronic component with the first contact element, and, contacting a second electrical contact of the electronic component with the second contact element.
We further provide a method of producing a component carrier for an electronic component including providing a lead frame section which comprises an electrically conductive material, the lead frame section having a first contact section that forms a first electrical contact element, a second contact section that forms a second electrical contact element, and a reception region that receives the electronic component, at least the reception region and the second contact section electrically conductively connected to one another, forming the first contact element and the second contact element from the lead frame section, the first contact element being physically separated from the second contact element, forming a thermally conductive and electrically insulating intermediate element that dissipates heat from the reception region and electrically insulates the reception region at least on an opposite side of the lead frame section from the reception region, embedding the first and the second contact element at least partially in a molding material, and forming a thermal contact that thermally contacts the electronic component at least on a side of the intermediate element facing away from the reception region.
We still further provide a component carrier that receives and contacts an electronic component including: a lead frame section having a first contact element that contacts a first electrode of the electronic component, having a second contact element that contacts a second electrode of the electronic component, and having a reception region that receives the electronic component, the reception region and the second contact element electrically conductively connected to one another, an intermediate element that electrically insulates the reception region and arranged on an opposite side of the lead frame section from the reception region, a thermal contact that thermally contacts the electronic component, the thermal contact being arranged on the intermediate element on a side of the intermediate element facing away from the reception region.
We yet further provide an electronic arrangement including the component carrier and the electronic component.
We furthermore provide radiation arrangement including the component carrier and the electronic component, wherein the electronic component is a radiation source.
We provide a method of producing a component carrier, a method of producing an electronic arrangement and/or a method of producing a radiation arrangement which simply and economically make it possible to produce the component carrier, the electronic arrangement and the radiation arrangement and/or which allow good electrical and thermal coupling of an electronic component to a printed circuit board and/or a heat sink.
A component carrier, an electronic arrangement and/or a radiation arrangement can be produced simply and economically and/or which allow good electrical and thermal coupling of an electronic component to a printed circuit board and/or a heat sink in a simple and economical way.
We provide a method of producing a component carrier for an electronic component. A lead frame section which comprises an electrically conductive material is thus provided. The lead frame section furthermore has a first contact section to form a first electrical contact element, a second contact section to form a second electrical contact element, and a reception region to receive the electronic component. At least the reception region and the second contact section electrically conductively connect to one another. A thermally conductive and electrically insulating intermediate element to dissipate heat from the reception region and for electrical insulation of the reception region is formed at least on an opposite side of the lead frame section from the reception region. A thermal contact to thermally contact the electronic component is formed at least on a side of the intermediate element facing away from the reception region.
Provision of the lead frame section comprising the electrically conductive material, formation of the intermediate element close or next to the reception region and formation of the thermal contact on the intermediate element contribute to the possibility of producing the component carrier simply and economically, the possibility of heat generated during operation of the electronic component being dissipated rapidly and effectively, and the possibility of the component carrier being coupled simply and economically with good electrical and thermal coupling to a printed circuit board and/or a heat sink. Furthermore, the electronic arrangement can have very good behavior under alternating thermal loading since the material of the printed circuit board section can be adapted particularly well to the thermal expansion coefficient of the printed circuit board and/or of the heat sink. In this case, the printed circuit board may, for example, be an FR1, FR2, FR3, FR4, FR5, CEM1, CEM2, CEM3, CEM4 or CEM5 printed circuit board, for example, a through-contacted FR-4 printed circuit board. The component carrier may, for example, also be referred to as a housing, QFN housing or QFN carrier. The lead frame section may, for example, also be referred to as a QFN lead frame. The component carrier with the electronic component may also be referred to as an electronic part or an electronic arrangement. The electronic component is, for example, a semiconductor chip and/or a light-emitting or light-absorbing component.
The heat sink may, for example, comprise aluminum. The component carrier may, for example, be coupled to the heat sink via the printed circuit board or directly.
The component carrier may, for example, be used to receive an electronic component. The component carrier with the electronic component may be referred to as an electronic arrangement. Furthermore, the component carrier with the electronic component may be referred to as a radiation arrangement if the electronic component comprises a radiation source, for example, a light-emitting component.
The lead frame section comprises the electrically conductive material and/or may be formed from the electrically conductive material. The electrically conductive material comprises, for example, a metal, for example, copper, for example, CuW or CuMo, copper alloys, brass, nickel and/or iron, for example, FeNi and/or is formed therefrom. The lead frame section is part of a lead frame which comprises a plurality of lead frame sections connected to one another, in which case each of the lead frame sections may, for example, be formed to form one of the component carriers. In other words, the lead frame may extend over a plurality of component carriers, in which case the multiplicity of component carriers may be formed and/or produced simultaneously so that a component carrier assembly is produced. The lead frames and/or the lead frame sections may, for example, be formed flat which means, for example, that the lead frame or each of the lead frame sections has a relatively small thickness compared with its length and its width.
Processing the lead frame section and, therefore, production of the component carrier, may be representative of processing the lead frame and, therefore, representative of production of the component carrier assembly. In other words, all the lead frame sections of the lead frame may be simultaneously processed in the same working steps as described with reference to the one lead frame section. After production of the component carrier assembly, the individual component carriers may be separated from the component carrier assembly, inter alia by cutting through the connections of the lead frame sections to one another.
The first contact element is used to contact a first contact of the electronic component. The second contact element is used to contact a second contact of the electronic component. The first and the second contact section may, for example, be formed next to one another in which case the reception region may be formed between the two contact sections. For example, the reception region may be arranged in a reception section formed between the first and the second contact section.
The intermediate element has, for example, a thickness of 1 to 1000 μm, for example, 10 to 200 μm, for example, 20 to 80 μm. The intermediate element has, for example, a thermal conductivity of 0.1 to 100 W/mK, for example, 0.5 to 20 W/mK, for example, 1 to 5 W/mK. The intermediate element may, for example, be applied in an already structured form onto the lead frame section. For example, the material of the intermediate element may be applied by screen printing, template printing, spraying (jet printing) or by a dispersion method, or introduced in liquid form into a shaping intermediate region of the lead frame section. Alternatively, the intermediate element may be applied flat onto the lead frame section and then structured. For example, the intermediate element may be applied as an intermediate layer, for example, by printing, casting or lamination, and eroded, and thereby structured, for example, by laser ablation or etching or mechanically, for example, by milling or scratching.
The solderable thermal contact has, for example, a thickness of 0.1 to 100 μm, for example, 1 to 10 μm, for example, approximately 5 μm. The thermal contact has, for example, a high thermal conductivity, for example, 100 to 1000 W/mK, for example, 200 to 500 W/mK, for example, 250 to 400 W/mK. The thermal contact is, for example, formed such that it is contactable via a solder connection. The thermal contact comprises, for example, metal, for example, copper, titanium, gold, silver, nickel and/or palladium, for example, NiPdAu. The thermal contact may, for example, be applied flat in a contact layer and then structured, or may be applied in a structured form. The thermal contact may, for example, be formed and/or structured with the aid of a photolithographic process and/or an etching process, and/or the thermal contact may be applied by an electroplating process.
The intermediate element comprises, for example, a dielectric and/or, for example, an organic and/or inorganic material. For example, the dielectric comprises ceramic particles and/or a carrier compound comprising ceramic particles. For example, ceramic particles are embedded in the carrier compound. For example, the carrier compound comprises epoxy resin, silicone and/or acrylic resin. For example, the ceramic comprises aluminum oxide, quartz, aluminum nitride, boron nitride and/or silicon carbide.
The thermal contact may comprise a metal. For example, the thermal contact comprises copper or is formed therefrom.
The first contact element and the second contact element may be formed from the lead frame section, the first contact element being physically separated from the second contact element. The first and the second contact element may be formed and/or separated from one another before or after the application of the intermediate element. The reception region is, for example, also in physical contact with the second contact element after formation or separation of the two contact elements. For example, the reception region is formed on the same material piece as the second contact element. In other words, the reception region and the second contact element may be formed in one piece.
The first contact element may be physically separated from the second contact element with the aid of an etching process. This can contribute to simple formation of the contact elements.
An intermediate region that receives the intermediate element may be formed on the opposite side of the lead frame section from the reception region. The intermediate region is optionally formed before the application of the intermediate element and may be formed before, during or after formation and/or separation of the first and second contact element. The intermediate region may, for example, comprise a recess in the lead frame section, or the intermediate region may comprise a taper at which the lead frame section has a smaller thickness than on the first and/or second contact element.
The intermediate region may be formed in the same working step as the first and the second contact element. For example, the intermediate region may be formed in the same etching process as that in which the first and the second contact element are formed and/or separated from one another.
The intermediate element and/or the thermal contact may be formed in the same working step as the first and the second contact element. For example, an intermediate layer and/or a contact layer may initially be applied onto the lead frame section, and then the intermediate element may be formed from the intermediate layer, or the thermal contact may be formed from the contact layer, in the same etching process as that in which the two contact elements are produced.
The first and the second contact element may be embedded at least partially in a molding material. In this context, the fact that the first and the second contact element are embedded in a molding material means that the first and the second contact element are at least partially surrounded by the molding material, but that regions of the first and second contact element and/or of the reception region and/or of the intermediate region and/or of the thermal contact may also remain free of molding material. The molding material may, for example, be an encapsulation compound or an injection-molding compound. The molding material may, for example, comprise an inorganic material, for example, a composite material, for example, epoxy resin, and/or silicone, a silicone hybrid and/or a silicone-epoxide hybrid. The first and the second contact element may, for example, be embedded in the molding material before or after formation of the intermediate region. The first and the second contact element may, for example, be embedded in the molding material before or after formation of the intermediate element and/or before or after formation of the thermal contact. The molding material may, for example, be used to mechanically connect the first and the second electrical contact element to one another and electrically insulate them from one another. Furthermore, the molding material may be used to externally insulate the two electrical contacts at least partially.
The molding material may be used as the intermediate element. For example, the molding material and the intermediate element may be formed in one working step and/or formed from the same material. For example, the molding material may form the intermediate element. This can contribute to the intermediate element being formed particularly simply and economically.
The molding material may be shaped such that it has a reception recess in which the first contact element, the second contact element and/or the reception region are at least partially exposed. This contributes to the possibility of fastening and/or contacting the electronic component in a straightforward way on the component carrier.
A method of producing an electronic arrangement is provided, wherein a component carrier is produced, for example, according to the method explained above, and wherein the electronic component is applied onto the reception region of the component carrier. A first electrical contact of the electronic component is contacted with the first contact element and a second electrical contact of the electronic component is contacted with the second contact element. The first and/or the second electrical contact may, for example, be contacted by bonding with the corresponding first and/or second contact element. The electronic component is, for example, a light-emitting component, for example, an LED or an OLED, or a light-absorbing component, for example, a solar cell.
If the second electrical contact is formed on a side of the electronic component facing toward the reception region, for example, if the electronic component is a vertical LED, then the contacting of the second contact with the second contact element may be carried out by applying the electronic component onto the reception region and via the physical connection of the reception region to the second contact element.
A method of producing a radiation arrangement is provided, wherein an electronic arrangement is produced, for example, according to the method or methods explained above, a radiation source being used as the electronic component. The radiation source is, for example, a light-emitting component, for example, an OLED or an LED, for example, a thin-film LED and/or, for example, a horizontal or vertical LED.
A component carrier that receives and contacts an electronic component is provided. The component carrier comprises a lead frame section, an intermediate element and a thermal contact. The lead frame section has a first contact element, a second contact element and a reception region. The first contact element is used to contact a first electrode of the electronic component. The reception region is used to receive the electronic component. The second contact element is used to contact a second electrode of the electronic component. The reception region and the second contact element electrically conductively connect to one another. The intermediate element is used to electrically insulate the reception region and dissipate heat from the reception region, and arranged on an opposite side of the lead frame section from the reception region. The thermal contact is used to thermally contact the electronic component, for example, via the intermediate element and the reception region. The thermal contact is arranged on the intermediate element on a side of the intermediate element facing away from the reception region. The component carrier is, for example, formed with the aid of one of the methods explained above. The component carrier is, for example, formed in the component carrier assembly and then separated.
An electronic arrangement is provided, which may comprise the component carrier and the electronic component. The component carrier and the electronic element are, for example, fastened on one another and contacted with one another as explained above.
A radiation arrangement is provided, which may comprise the component carrier and the electronic component, wherein the electronic component is a radiation source, for example, as described above.
Methods and/or method steps leading to various examples of the component carrier, the electronic arrangement and/or the radiation arrangement may readily be applied to different examples of the component carrier, the electronic arrangement and/or the radiation arrangement.
Examples are represented in the figures and will be explained in more detail below.
In the following detailed description, reference is made to the appended drawings, which form part of this description and in which specific examples in which our methods and arrangements may be implemented are shown for illustration. In this regard, direction terminology such as “up”, “down”, “forward”, “backward”, “front”, “rear”, and the like is used with reference to the orientation of the figure or figures being described. Since components of examples can be positioned in a number of different orientations, the direction terminology is used for illustration and is in no way restrictive. It is to be understood that other examples may be used and structural or logical modifications may be carried out, without departing from the protective scope of the appended claims. It is to be understood that the features of the various examples described herein may be combined with one another, unless specifically indicated otherwise. The following detailed description is therefore not to be interpreted in a restrictive sense, and the protective scope is defined by the appended claims.
In the scope of this description, terms such as “connected” or “coupled” are used to describe both direct and indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are provided with identical references, insofar as this is expedient.
A light-emitting component may in various examples be formed as a light-emitting diode (LED) or an organic light-emitting diode (OLED) or as an organic light-emitting transistor. The light-emitting component may in various examples be part of an integrated circuit. Furthermore, a multiplicity of light-emitting components may be provided, for example, fitted in a common housing.
Thermal lines 16 extend through the printed circuit board 14. The thermal lines 16 connect via some of the first conductor tracks 12 to the electrical arrangements 10 to dissipate heat from the electronic arrangements 10. The thermal lines 16 comprise, for example, copper or are formed therefrom. The thermal lines 16 are used to dissipate heat rapidly and effectively from the electronic arrangements 10. On its side facing away from the electronic arrangements 10, the printed circuit board 14 comprises electrically conductive second conductor tracks 20. The second conductor tracks 20 comprise copper or are formed therefrom. The conductor tracks 12, 20 comprise, for example, aluminum, copper, nickel, platinum, gold, silver and/or TiW.
The printed circuit board 14 couples thermally and mechanically to a heat sink 18, for example, via the second conductor tracks 20. For example, the printed circuit board 14 may be fixed to the heat sink 18 by a thermally and/or electrically conductive adhesive 22 on the second conductor tracks 20. The heat sink 18 comprises, for example, aluminum, nickel, iron or copper and/or, for example, alloys based on copper, nickel, iron and/or aluminum.
A plurality of examples of methods of producing a component carrier for the electronic arrangements 10 and/or for the radiation arrangements will be described below.
The lead frame section 30 comprises, for example, a metal, for example, copper, and/or is formed therefrom. The lead frame section 30 has a high electrical conductivity. Furthermore, the lead frame section 30 has a high thermal conductivity. Furthermore, the lead frame section 30 may optionally be coated. The lead frame section 30 has, for example, a thickness of 10 to 1000 μm, for example, 100 to 500 μm, for example, 150 to 300 μm. The lead frame section 30 is used as a carrier body for one of the component carriers. The lead frame therefore comprises carrier bodies for a plurality of component carriers.
The lead frame section 30 has a first contact section 32 and a second contact section 34. Arranged between the two contact sections 32, 34, there is a reception section 36 which has a reception region 38. The sections 32, 34, 26 and the reception region 38 initially constitute unprocessed sections or regions of the printed circuit board section 30, and are used for illustration of the methods described.
During the etching process, the first and the second contact section 32, 34 are separated from one another so that a first contact element 42 is formed in the first contact region 32 and a second contact element 44 is formed in the second contact region 34. The two contact elements 42, 44 are physically separated from one another inside the lead frame section 30 represented, although in the lead frame assembly they may be connected to one another via neighboring lead frame sections 30 (not represented). The second contact element 44 is physically coupled to the reception region 38, and is, for example, formed in one piece with the reception region 38.
Furthermore, during the etching process, an intermediate region 48 which comprises a recess in the lead frame section 30 is formed on an opposite side of the lead frame section 30 from the reception region 38. Furthermore, a further recess may optionally be formed at a transition from the second contact region 34 to the reception region 36, i.e. between the second contact element 44 and the intermediate region 48. The intermediate region 48 and/or the further recess have a depth which corresponds, for example, to half the thickness of the lead frame section 30, in which case the depth may, for example, deviate from half the thickness of the lead frame section 30 by, for example, up to 100 μm, for example, up to 50 μm or, for example, up to 30 μm. As an alternative to formation of the intermediate region 48 in the etching process, the intermediate region 48 may, for example, be formed in the lead frame section 30 by boring, grinding and/or embossing.
The molding material 54 is formed, for example, by molding, for example, transfer molding or by injecting the molding material 54 around the lead frame section. For example, the lead frame comprising all the lead frame sections 30, respectively, with the two contact elements 44, 42 may be placed in a casting or molding body and then cast or injected around with the liquid molding material 54 in which case the molding material 54 may subsequently be dried and/or cured. The casting or molding body is formed such that a reception recess 56 is formed in the molding material 54. In the reception recess 56, at least the reception region 38 is exposed. Furthermore, the first and second contact element 42, 44 may be at least partially exposed in the reception recess 56. Furthermore, the two contact elements 42, 44 are at least partially free of molding material 54 on their sides facing away from the reception recess 56.
As an alternative to introducing the intermediate element 50 into the intermediate region 48 before formation of the molding material 54, during formation of the molding material 54 the intermediate region 48 may be kept free of molding material 54 and the intermediate element 50 may not be introduced until after the formation of the molding material 54 in the intermediate region 48.
Before or after formation of the molding material 54, a thermal contact 52 is formed on a side of the intermediate element 50 facing away from the reception region 38. The thermal contact 52 may, for example, as explained in more detail by way of example below with reference to
The electronic component 60 comprises, for example, a first electrical contact 62 on its side facing away from the lead frame section 30 and a second electrical contact 66 on a side facing toward the lead frame section 30. At least one, for example, a plurality of optical layers are formed between the first electrical contact 62 and the second electrical contact 66. For example, optically functional layers are formed, which, for example, emit light when an electrical voltage is applied between the first and the second electrical contact 62, 66. Furthermore, various scattering and/or conversion layers may be provided as optically functional layers to scatter or convert the electromagnetic radiation generated in the light-emitting component.
The first electrical contact 62 of the electronic component 60 electrically connects via a first bond contact 70, an electrical line 72 and a second bond contact 74 to the first electrical contact element 42 of the component carrier. The second electrical contact 66 is in physical contact with the reception region 38 of the lead frame section 30. The reception region 38 and, therefore, the second electrical contact 66 of the electronic component 60 are electrically coupled to the second contact element 44. The reception region 38 of the lead frame section 30 is therefore used for both mechanical and electrical coupling of the electronic component 60 to the printed circuit board section 30.
During operation of the electronic component 60, heat may be generated, which is absorbed by the lead frame section 30 in the reception region 38. The heat can be dissipated via the intermediate element 50 to the thermal contact 52. At the same time, the intermediate element 50 forms electrical insulation of the reception region 38 from the thermal contact 52, and therefore electrical insulation of the thermal contact 52 from the electronic component 60.
The electronic component 60 is arranged in the reception recess 56 of the molding material 54. The reception recess 56 may in other regards, for example, be filled with a filler material, for example, with a light-scattering material. In other words, the electronic component 60 in the reception recess 56 may be embedded in a filler material.
Subsequently, the lead frame sections 30 may be separated from the lead frame or the component carriers may be separated from the component carrier assembly, for example, by means of cutting or sawing.
Owing to the smaller thickness of the lead frame section 30 at the reception region 38 and the intermediate region 48, the molding material 54 is also formed adjoining the intermediate region 48 so that the intermediate region 48 is covered or filled with molding material 54. The molding material 54 thereby forms the intermediate element 50. In other words, in this example, the intermediate element 50 is formed by the molding material 54. A thickness of the intermediate element 50 corresponds, for example, to approximately a depth of the intermediate region 48 shown in
The electronic component 60 is applied onto the lead frame section 30 and contacted on the lead frame section 30, for example, as explained in more detail with reference to
Subsequently, the lead frame sections 30 can be separated from the lead frame or the component carriers can be separated from the component carrier assembly, for example, by cutting or sawing.
In the second production method, formation of a separate intermediate element 50 may be omitted since this is formed by the molding material 54. In this example of the method of producing a component carrier, the molding material 54 has, for example, a particularly high thermal conductivity.
As an alternative to flat application of the intermediate layer 86 as explained with reference to
In this example, the intermediate element 50 may be formed to be particularly thin, which can contribute to particularly good dissipation of heat via the intermediate element 50. Furthermore, the component carrier, for example, the housing, for example, the QFN housing is formed flat on its side facing away from the electronic component 60 which can contribute to simple arrangement of the component carrier, for example, on the printed circuit board 14.
The fifth example of the method of producing the component carrier may, for example, be carried out with only one single etching process.
Our methods and arrangements are not restricted to the examples indicated. For example, the molding material 54 may be formed by transfer-compression molding or injection molding in all examples. In principle, for all examples, a small thickness of the intermediate element 50 can contribute to good dissipation of heat. The small thickness of the intermediate element 50 may, for example, be achieved by a small depth of the recess of the intermediate region 48 or by a small thickness of the intermediate layer 86.
Number | Date | Country | Kind |
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10 2012 207 519.4 | May 2012 | DE | national |
Filing Document | Filing Date | Country | Kind |
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PCT/EP2013/059445 | 5/7/2013 | WO | 00 |