Number | Date | Country | Kind |
---|---|---|---|
5-322455 | Dec 1993 | JPX | |
5-328698 | Dec 1993 | JPX | |
5-333562 | Dec 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5296714 | Treglio | Mar 1994 |
Number | Date | Country |
---|---|---|
0284436A2 | Sep 1988 | EPX |
0403418A2 | Dec 1990 | EPX |
0429251A2 | May 1991 | EPX |
52-72155 | Jun 1977 | JPX |
200529 | Nov 1983 | JPX |
2130279 | Jun 1987 | JPX |
5021392 | Jan 1993 | JPX |
Entry |
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"Control of reactive plasmas in a multicusp plasma source equipped with a movable magnetic filter", by Osamu Fukumasa et al, Journal of Applied Physics, 74(2), Jul. 15, 1993, pp. 848-852. |