SCRUBBER BRUSH WITH SLEEVE AND BRUSH MANDREL FOR USE WITH THE SCRUBBER BRUSH

Abstract

In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an isometric view of a scrubber brush that may be included in a scrubber brush assembly provided in accordance with an embodiment of the present invention.

FIG. 2 is an isometric view of an exemplary sleeve provided in accordance with the present invention.

FIG. 3A is an end view of an exemplary embodiment of a sleeve coupled to a brush provided in accordance with the present invention.

FIG. 3B is a side cross sectional view of an exemplary embodiment of a sleeve coupled to a brush provided in accordance with the present invention.

FIG. 4 is an isometric view of an exemplary mandrel provided in accordance with the present invention.

FIG. 5 is an enlarged, isometric view of the mandrel depicted in FIG. 4 being inserted into to a brush and sleeve as provided in accordance with the present invention.

FIG. 6 is an end view of an exemplary brush assembly formed by inserting a mandrel into a sleeve as provided in accordance with the present invention.

FIG. 7 is a side cross sectional view of a brush assembly inserted between an exemplary rotary mount and drive shaft of a substrate processing system as provided in accordance with the present invention.

FIG. 8 is an enlarged side cross sectional view of a portion of the brush assembly depicted in FIG. 7 illustrating a spacing between the sleeve and the drive shaft.

FIG. 9 is a side cross sectional view of a brush assembly inserted between a rotary mount and drive shaft of a substrate processing system including a spacer as provided in accordance with the present invention.

FIG. 10 is an enlarged side cross sectional view of a portion of the brush assembly depicted in FIG. 9 illustrating a spacing between the sleeve and the drive shaft.

Claims

1. A method for assembling a scrubber brush assembly, comprising: providing a scrubber brush formed on a sleeve; andinserting a mandrel into the sleeve to form the scrubber brush assembly.

2. The method of claim 1, further comprising: providing coupling features on an exterior surface of the sleeve adapted to prevent rotation of the sleeve relative to the scrubber brush.

3. The method of claim 1, further comprising: providing mating coupling features on the sleeve and the mandrel adapted to prevent rotation of the mandrel relative to the sleeve.

4. The method of claim 1, further comprising: providing aligned openings on the sleeve and mandrel such that a fluid may be jetted through the openings in the mandrel to the scrubber brush.

5. A scrubber brush assembly comprising: a cylindrical brush including exterior and interior surfaces;a sleeve having an exterior surface coupled to the interior surface of the brush and an interior surface, the exterior surface of the sleeve including first coupling features adapted to prevent rotation of the sleeve relative to the brush; anda mandrel coupled to the interior surface of the sleeve.

6. The scrubber brush assembly of claim 5, wherein the first coupling features comprise a plurality of ribs that protrude from the exterior surface of the sleeve and extend longitudinally along a length of the sleeve.

7. The scrubber brush assembly of claim 6, wherein the plurality of ribs includes four ribs equally spaced apart on the exterior surface of the sleeve.

8. The scrubber brush assembly of claim 5, wherein the interior surface of the sleeve includes second coupling features adapted to prevent rotation of the sleeve relative to the mandrel.

9. The scrubber brush assembly of claim 8, wherein the second coupling features comprise a plurality of ribs that protrude from the interior surface of the sleeve and extend longitudinally along a length of the sleeve.

10. The scrubber brush assembly of claim 5, wherein the sleeve includes a plurality of openings into which the brush extends, so as to provide contact between the mandrel and the brush.

11. The scrubber brush assembly of claim 10, wherein the mandrel includes a plurality of openings aligned with the plurality of openings of the sleeve so as to enable delivery of fluid from the plurality of openings in the mandrel to the brush.

12. A sleeve for use in a scrubber brush assembly comprising: a cylindrical body having an exterior surface adapted to couple to a scrubber brush and an interior surface adapted to couple to a mandrel.

13. The sleeve of claim 12, further comprising: first coupling features positioned on the exterior surface adapted to prevent rotation of the sleeve relative to the scrubber brush.

14. The sleeve of claim 12, wherein the first coupling features comprise a plurality of ribs that protrude from the exterior surface of the sleeve and extend longitudinally along a length of the sleeve.

15. The sleeve of claim 14, wherein the plurality of ribs includes four ribs equally spaced apart on the exterior surface of the sleeve.

16. The sleeve of claim 12, further comprising: second coupling features positioned on the interior surface adapted to prevent rotation of the sleeve relative to the mandrel.

17. The sleeve of claim 16, wherein the second coupling features comprise a plurality of ribs that protrude from the interior surface of the sleeve and extend longitudinally along a length of the sleeve.

18. The sleeve of claim 17, wherein the plurality of ribs include sloping sidewalls extending inward from the interior surface of the sleeve.

19. A mandrel for use in a scrubber brush assembly having a scrubber brush formed on a sleeve comprising: a cylindrical body having an exterior surface adapted to couple to an interior surface of the sleeve.

20. The mandrel of claim 19, further comprising: a plurality of grooves and raised regions positioned on the exterior surface of the cylindrical body.

21. The mandrel of claim 20, wherein the grooves are adapted to mate with corresponding coupling features on the interior surface of the sleeve.

22. The mandrel of claim 19, wherein the cylindrical body includes first and second ends, the first end having a lip adapted to prevent the mandrel from sliding off of the interior surface of the sleeve in a longitudinal direction.

23. The mandrel of claim 22, further comprising: a drive-shaft coupling feature positioned at the second end of the cylindrical body adapted to couple the mandrel to a drive shaft and to provide a space between the drive shaft and the sleeve.