Number | Date | Country | Kind |
---|---|---|---|
57-11997 | Jan 1982 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4125643 | Reuschel | Nov 1978 | |
4332833 | Aspens et al. | Jun 1982 | |
4348886 | Faith | Sep 1982 | |
4388342 | Suzuki et al. | Jun 1983 |
Entry |
---|
Brochure on AMC 7900 RP Reactors, sold by Applied Materials, Inc. of Santa Clara, Calif. |
"Automation of Semiconductor Device Manufacturing", Denshi Zairyo, Nov. 1979. |
"Computer Control Epitaxial Production Systems", Don Jackson of Motorola, Inc., Solid State Technology, Nov. 1972. |
"An Analysis of LBCVD System Parameter for Polysilicon, Silicon Nitride, and Silicon Dioxide Deposition", W. A. Brown and T. I. Kamins of Hewlett Packard Labs, Solid State Technology, Jul. 1979. |
Number | Date | Country | |
---|---|---|---|
Parent | 461231 | Jan 1983 |