Sputter apparatus with a pipe cathode and method for operating this sputter apparatus

Abstract

A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

Description

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 a section through a vacuum chamber with a segment of a fore-vacuum chamber connected thereto,

FIG. 2 a top view onto a segment of the vacuum chamber shown in FIG. 1 with the fore-vacuum chamber connected thereto,

FIG. 3 a longitudinal section through the pipe cathode depicted in FIG. 1,

FIG. 4 a section B-B through the pipe cathode shown in FIG. 1,

FIG. 5 a a section along C-C through a segment of the fore-vacuum chamber shown in FIG. 1 with a receptor and line elements for the power supply connected thereto,

FIG. 5 b a section along C-C through a segment of the fore-vacuum chamber depicted in FIG. 1 with a receptor and line elements for the cooling means supply connected thereto,

FIG. 6 an enlarged segment of the pipe cathode depicted in FIG. 1 with the axle,

FIG. 7 a segment of a spiral flat spring with several line elements.

Claims

1-21. (canceled)

22. A sputter apparatus comprising a vacuum chamber,a pipe cathode in the vacuum chamber,a rotatable receptor onto whose outside flexible conducting line elements can be wound and from which they can be wound out, andconnecting elements, with which the flexible line elements are connectable with the rotatable receptor.

23. The sputter apparatus as claimed in claim 22, wherein connecting elements are at least one of a clamp or plug connection.

24. The sputter apparatus as claimed in claim 22, wherein the rotatable receptor is disposed outside of the vacuum chamber.

25. The sputter apparatus as claimed in claim 22, wherein the rotatable receptor is disposed in the vacuum chamber.

26. The sputter apparatus as claimed in claim 22, wherein the rotatable receptor is disposed in a fore-vacuum chamber.

27. The sputter apparatus as claimed in claim 22, wherein the rotatable receptor is formed tubularly and has a coaxial internal tube.

28. The sputter apparatus as claimed in claim 22, wherein the flexible line elements are power lines.

29. The sputter apparatus as claimed in claim 22, wherein the flexible line elements are cooling hoses.

30. The sputter apparatus as claimed in claim 22, wherein the flexible line elements are at least partially disposed on a spiral flat spring.

31. The sputter apparatus as claimed in claim 30, wherein the line elements are fixedly connected with the spiral flat spring via connecting elements.

32. The sputter apparatus as claimed in claim 30, wherein the spiral flat spring comprises a substantially flexible material.

33. The sputter apparatus as claimed in claim 30, wherein the spiral flat spring conducts electric energy.

34. The sputter apparatus as claimed in claim 22, wherein the line elements are energy lines.

35. The sputter apparatus as claimed in claim 22, wherein the line elements are signal lines.

36. The sputter apparatus as claimed in claim 30, wherein the spiral flat spring is disposed on a fastening device.

37. The sputter apparatus as claimed in claim 22, wherein the line elements are connected with an axle via connecting elements.

38. The sputter apparatus as claimed in claim 36, wherein the length of the line elements corresponds at least to the length required for the connection with the connecting elements, plus the length required to wind the spiral flat spring with the line elements disposed on it once about the axle.

39. A method for coating substrates comprising a) rotating a pipe cathode by a first angle of ±150° to 270° about its longitudinal axis (A-A) in a first direction, wherein flexible line elements are wound onto a rotatable receptor or wound from it;b) moving the pipe cathode by a second angle about its longitudinal axis (A-A) in a second direction opposite to the first direction, wherein the second angle is greater or smaller by a defined magnitude than the first angle and wherein the flexible line elements are wound from the rotatable receptor or wound onto it.c) repeating steps a) and b) until the pipe cathode has moved at least by ±360° about its longitudinal axis.

40. The method as claimed in claim 39, wherein after the pipe cathode has moved by at least ±360° about its longitudinal axis (A-A), the method is repeated wherein the rotational movements now take place opposite directions.

41. The method as claimed in claim 39, wherein the angle in step b) is greater or smaller by approximately 10° than in step a).

42. The method as claimed in claim 39, wherein a spiral flat spring on which the line elements are disposed, is also wound onto the receptor or wound from it.

43. The sputter apparatus as claimed in claim 37, wherein the length of the line elements corresponds at least to the length required for the connection with the connecting elements, plus the length required to wind the spiral flat spring with the line elements disposed thereon once about the axle.

44. The sputter apparatus as claimed in claim 33, wherein the line elements are energy lines.