Number | Name | Date | Kind |
---|---|---|---|
2692948 | Lion | Oct 1954 | |
3767968 | Ogle | Oct 1973 | |
3789471 | Spindt et al. | Feb 1974 | |
3855499 | Yamada et al. | Dec 1974 | |
3921022 | Levine | Nov 1975 | |
3970887 | Smith et al. | Jul 1976 | |
3998678 | Fukase et al. | Dec 1976 | |
4008412 | Yuito et al. | Feb 1977 | |
4020381 | Oess et al. | Apr 1977 | |
4081712 | Bode et al. | Mar 1978 | |
4095133 | Hoeberechts | Jun 1978 | |
4163949 | Shelton | Aug 1979 | |
4307507 | Gray et al. | Dec 1981 |
Entry |
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T. R. Shoulders, "Microelectronics Using Electron-Beam-Activated Machining Techniques", Advances in Computers, 2, pp. 135-197. Academic Press, New York, London, 1961. |