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Astrileux Corporation
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La Jolla, CA, US
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Patents Applications
last 30 patents
Information
Patent Application
EUV PHOTOMASK ARCHITECTURES FOR PATTERNING OF INTEGRATED CIRCUITS
Publication number
20230101021
Publication date
Mar 30, 2023
Astrileux Corporation
Supriya JAISWAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK HAVING REFLECTIVE LAYER WITH NON-REFLECTIVE REGIONS
Publication number
20200124957
Publication date
Apr 23, 2020
Astrileux Corporation
Supriya JAISWAL
B82 - NANO-TECHNOLOGY
NSF Awards
last 12 months
processing...
Count: 3
NSF Awards
Information
NSF Award
SBIR Phase II: Next Generation High Performance EUV Photomasks.
Award Id
1927546
Effective date
Oct 1, 2019
Information
NSF Award
SBIR Phase II: Novel Technologies to Enable High Volume, Extreme Ul...
Award Id
1457418
Effective date
Mar 1, 2015
Information
NSF Award
SBIR Phase I: Novel Technologies to Enable High Volume EUV Manufact...
Award Id
1343877
Effective date
Jan 1, 2014