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Patents Grantslast 30 patents

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Count: 9

Information NSF Award
SBIR Phase II: Rapid In-Line Detection of Macro Defects in Semicond...
- Award Id 1229938
- Effective date Sep 1, 2012
Information NSF Award
SBIR Phase I: Rapid In-Line Detection of Macro Defects in Semicondu...
- Award Id 1046110
- Effective date Jan 1, 2011
Information NSF Award
SBIR Phase I: Model-Based Control of Millisecond Flash Annealing of...
- Award Id 1013689
- Effective date Jul 1, 2010
Information NSF Award
SBIR Phase II: Model-Based Control for Chemical-Mechanical Planariz...
- Award Id 0923830
- Effective date Aug 15, 2009
Information NSF Award
SBIR Phase I: Model-Based Control for Chemical-Mechanical Planariza...
- Award Id 0740214
- Effective date Jan 1, 2008
Information NSF Award
SBIR Phase II: An Integrated Software Tool for Modeling and Model-B...
- Award Id 0450482
- Effective date Jun 1, 2005
Information NSF Award
SBIR Phase I: An Integrated Software Tool for Modeling and Model-Ba...
- Award Id 0319970
- Effective date Jul 1, 2003
Information NSF Award
SBIR Phase II: Modeling and Model-Based Control for Chemical Mechan...
- Award Id 9983309
- Effective date Jul 1, 2000
Information NSF Award
SBIR Phase I: Modeling and Model-Based Control for Chemical Mechani...
- Award Id 9860163
- Effective date Jan 1, 1999