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Patent Application
CARRIER HEAD WITH MULTI-PART FLEXIBLE MEMBRANE
Publication number
20020094767
Publication date
Jul 18, 2002
ZUNIGA
Steven M. Zuniga
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER HEAD WITH CONTROLLABLE PRESSURE AND LOADING AREA FOR CHEMIC...
Publication number
20020061720
Publication date
May 23, 2002
ZUNIGA
STEVEN M. ZUNIGA
B24 - GRINDING POLISHING
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