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Aart Johannes Mateboer
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Al Waalre, NL
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last 30 patents
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Patent Grant
Six degree of freedom (DOF) actuator reaction mass
Patent number
7,885,021
Issue date
Feb 8, 2011
Carl Zeiss SMT GmbH
Frans H. van Deuren
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
SIX DEGREE OF FREEDOM (DOF) ACTUATOR REACTION MASS
Publication number
20090040638
Publication date
Feb 12, 2009
Carl Zeiss SMT AG
Frans H. van Deuren
G02 - OPTICS