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Akifumi Masuko
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Tokyo, JP
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last 30 patents
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Patent Grant
Process of producing a ruthenium or ruthenium oxide thin film
Patent number
6,316,064
Issue date
Nov 13, 2001
Asahi Denka Kogyo Kabushiki Kaisha
Kazuhisa Onozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Process for forming metal oxide film by means of CVD system
Patent number
6,117,487
Issue date
Sep 12, 2000
Asahi Denka Kogyo Kabushiki Kaisha
Mitsuo Akutsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...