Akihiro Yamada

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sequence control system employing a plurality of programmable logic...
- Patent number 4,751,672
- Issue date Jun 14, 1988
- Akihiro Yamada
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PRINTING APPARATUS
- Publication number 20130107319
- Publication date May 2, 2013
- Akihiro YAMADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Exposure apparatus and method, and device manufacturing method usin...
- Publication number 20060152700
- Publication date Jul 13, 2006
- Akihiro Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050173653
- Publication date Aug 11, 2005
- Akihiro Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection optical system, exposure apparatus and device fabricatio...
- Publication number 20050151950
- Publication date Jul 14, 2005
- Akihiro Yamada
- G02 - OPTICS