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Akira Yasumuro
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Film forming apparatus and vaporizer
Patent number
8,758,511
Issue date
Jun 24, 2014
Tokyo Electron Limited
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Middle plate for the shower head
Patent number
D581012
Issue date
Nov 18, 2008
Tokyo Electron Limited
Hachishiro Iizuka
D23 - Environmental heating and cooling
Patents Applications
last 30 patents
Information
Patent Application
Film Forming Apparatus and Vaporizer
Publication number
20070266944
Publication date
Nov 22, 2007
TOKYO ELECTRON LIMITED
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Liquid Amount Monitoring Apparatus, Semiconductor Manufacturing App...
Publication number
20070261735
Publication date
Nov 15, 2007
Akira Yasumuro
C30 - CRYSTAL GROWTH
Information
Patent Application
Gas treatment device and heat readiting method
Publication number
20070022954
Publication date
Feb 1, 2007
TOKYO ELECTRON LIMITED
Hachishiro Iizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...