Akira Yasumuro

Person

  • Yamanashi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus and vaporizer

    • Patent number 8,758,511
    • Issue date Jun 24, 2014
    • Tokyo Electron Limited
    • Hachishiro Iizuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Middle plate for the shower head

    • Patent number D581012
    • Issue date Nov 18, 2008
    • Tokyo Electron Limited
    • Hachishiro Iizuka
    • D23 - Environmental heating and cooling

Patents Applicationslast 30 patents