Alek Chi-Heng CHEN

Person

New Taipei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method for calibrating a manufacturing process model
- Patent number 9,541,500
- Issue date Jan 10, 2017
- ASML Netherlands B.V.
- Kuen-Yu Tsai
- G01 - MEASURING TESTING
Information Patent Grant
Method of preparing a pattern, method of forming a mask set, device...
- Patent number 8,945,800
- Issue date Feb 3, 2015
- ASML Netherlands B.V.
- Tsann-Bim Chiou
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PREPARING A PATTERN, METHOD OF FORMING A MASK SET, DEVICE...
- Publication number 20140051016
- Publication date Feb 20, 2014
- ASML NETHERLANDS B.V.
- Tsann-Bim CHIOU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for Calibrating a Manufacturing Process Model
- Publication number 20130073070
- Publication date Mar 21, 2013
- ASML NETHERLANDS B.V.
- Kuen-Yu TSAI
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070121090
- Publication date May 31, 2007
- ASML NETHERLANDS B.V.
- Alek Chi-Heng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate, method of exposing a substrate, machine readable medium
- Publication number 20070072133
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Alek Chi-Heng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate, method of exposing a substrate, machine readable medium
- Publication number 20070072097
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Alek Chi-Heng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate, lithographic multiple exposure method, machine readable...
- Publication number 20070018286
- Publication date Jan 25, 2007
- ASML NETHERLANDS B.V.
- Alek Chi-Heng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Alek Chi-Heng CHEN

Person

Patents Grantslast 30 patents

Method for calibrating a manufacturing process model

Method of preparing a pattern, method of forming a mask set, device...

Patents Applicationslast 30 patents

METHOD OF PREPARING A PATTERN, METHOD OF FORMING A MASK SET, DEVICE...

Method for Calibrating a Manufacturing Process Model

Lithographic apparatus and device manufacturing method

Substrate, method of exposing a substrate, machine readable medium

Substrate, method of exposing a substrate, machine readable medium

Substrate, lithographic multiple exposure method, machine readable...