Membership
Tour
Register
Log in
Allen KE
Follow
Person
Hsinchu City, TW
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Etch profile control of interconnect structures
Patent number
11,569,125
Issue date
Jan 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Allen Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch profile control of interconnect structures
Patent number
11,195,750
Issue date
Dec 7, 2021
Tawiwan Semiconductor Manufacturing Co., Ltd.
Allen Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch profile control of interconnect structures
Patent number
10,707,123
Issue date
Jul 7, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Allen Ke
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Etch Profile Control of Interconnect Structures
Publication number
20220093457
Publication date
Mar 24, 2022
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Allen KE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH PROFILE CONTROL OF INTERCONNECT STRUCTURES
Publication number
20200328113
Publication date
Oct 15, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Allen KE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH PROFILE CONTROL OF INTERCONNECT STRUCTURES
Publication number
20190096754
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Allen KE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH PROFILE CONTROL OF INTERCONNECT STRUCTURES
Publication number
20180315648
Publication date
Nov 1, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Allen KE
H01 - BASIC ELECTRIC ELEMENTS