Ann-Kathrin Wandner

Follow

Person

Lorch-Waldhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Cooler for use in a device in a vacuum
- Patent number 10,303,067
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
COOLER FOR USE IN A DEVICE IN A VACUUM
- Publication number 20160299443
- Publication date Oct 13, 2016
- Carl Zeiss SMT GMBH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
- Publication number 20150083938
- Publication date Mar 26, 2015
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS