Beom-jin YOO

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma generator, cleaning liquid processing apparatus, semiconduct...
- Patent number 11,545,372
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Beom Jin Yoo
- B08 - CLEANING
Information Patent Grant
Etching method using remote plasma source, and method of fabricatin...
- Patent number 10,418,250
- Issue date Sep 17, 2019
- Samsung Electronics Co., Ltd.
- Gon-jun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method, and method of manufacturing...
- Patent number 10,410,874
- Issue date Sep 10, 2019
- Samsung Electronics Co., Ltd.
- Beom Jin Yoo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATOR, CLEANING LIQUID PROCESSING APPARATUS, SEMICONDUCT...
- Publication number 20200020551
- Publication date Jan 16, 2020
- Samsung Electronics Co., Ltd.
- Beom Jin YOO
- B08 - CLEANING
Information Patent Application
Plasma Processing Apparatus and Method, and Method of Manufacturing...
- Publication number 20190035606
- Publication date Jan 31, 2019
- Samsung Electronics Co., Ltd.
- Beom Jin Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD USING REMOTE PLASMA SOURCE, AND METHOD OF FABRICATIN...
- Publication number 20180374709
- Publication date Dec 27, 2018
- Samsung Electronics Co., Ltd.
- Gon-jun KIM
- H01 - BASIC ELECTRIC ELEMENTS