Changfeng Xia

Person

Plano, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition system using benzotriazole (BTA) and isopropyl alc...
- Patent number 7,550,046
- Issue date Jun 23, 2009
- Texas Instruments Incorporated
- ChangFeng F. Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for removing polymer residue from semiconducto...
- Patent number 7,267,726
- Issue date Sep 11, 2007
- Texas Instruments Incorporated
- Changfeng Xia
- B08 - CLEANING
Information Patent Grant
Plating-rinse-plating process for fabricating copper interconnects
- Patent number 7,198,705
- Issue date Apr 3, 2007
- Texas Instruments Incorporated
- Linlin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Versatile system for wafer edge remediation
- Patent number 7,195,679
- Issue date Mar 27, 2007
- Texas Instruments Incorporated
- Changfeng Xia
- B08 - CLEANING
Information Patent Grant
Vapor deposition of benzotriazole (BTA) for protecting copper inter...
- Patent number 7,144,802
- Issue date Dec 5, 2006
- Texas Instruments Incorporated
- ChangFeng F. Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modified clean chemistry and megasonic nozzle for removing backside...
- Patent number 7,067,015
- Issue date Jun 27, 2006
- Texas Instruments Incorporated
- Changfeng Xia
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Copper surface passivation during semiconductor manufacturing
- Patent number 6,784,093
- Issue date Aug 31, 2004
- Texas Instruments Incorporated
- Jiong-Ping Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a conductive copper structure
- Patent number 6,743,719
- Issue date Jun 1, 2004
- Texas Instruments Incorporated
- Linlin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast deposition on spherical-shaped integrated circuits in non-cont...
- Patent number 6,303,517
- Issue date Oct 16, 2001
- Ball Semiconductor, Inc.
- Changfeng Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature plasma-assisted diffusion
- Patent number 6,221,165
- Issue date Apr 24, 2001
- Ball Semiconductor, Inc.
- Yanwei Zhang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Plasma-assisted metallic film deposition
- Patent number 6,053,123
- Issue date Apr 25, 2000
- Ball Semiconductor, Inc.
- Changfeng Xia
- C30 - CRYSTAL GROWTH
Information Patent Grant
Film growth system and method for spherical-shaped semiconductor in...
- Patent number 6,015,464
- Issue date Jan 18, 2000
- Ball Semiconductor, Inc.
- Changfeng Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vapor deposition of benzotriazole (BTA) for protecting copper inter...
- Publication number 20080047490
- Publication date Feb 28, 2008
- ChangFeng F. Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and methods for removing/containing wafer edge defects post...
- Publication number 20070228010
- Publication date Oct 4, 2007
- TEXAS INSTRUMENTS INCORPORATED
- James Scott Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor deposition of benzotriazole (BTA) for protecting copper inter...
- Publication number 20060270233
- Publication date Nov 30, 2006
- ChangFeng F. Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Versatile system for wafer edge remediation
- Publication number 20040255985
- Publication date Dec 23, 2004
- Changfeng Xia
- B08 - CLEANING
Information Patent Application
Method and apparatus for removing polymer residue from semiconducto...
- Publication number 20040211442
- Publication date Oct 28, 2004
- Changfeng Xia
- B08 - CLEANING
Information Patent Application
Vapor deposition of benzotriazole (BTA) for protecting copper inter...
- Publication number 20040197958
- Publication date Oct 7, 2004
- ChangFeng F. Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plating-rinse-plating process for fabricating copper interconnects
- Publication number 20040118692
- Publication date Jun 24, 2004
- Linlin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modified clean chemistry and megasonic nozzle for removing backside...
- Publication number 20040084059
- Publication date May 6, 2004
- TEXAS INSTRUMENTS INCORPORATED
- Changfeng Xia
- B08 - CLEANING

Changfeng Xia

Person

Patents Grantslast 30 patents

Vapor deposition system using benzotriazole (BTA) and isopropyl alc...

Method and apparatus for removing polymer residue from semiconducto...

Plating-rinse-plating process for fabricating copper interconnects

Versatile system for wafer edge remediation

Vapor deposition of benzotriazole (BTA) for protecting copper inter...

Modified clean chemistry and megasonic nozzle for removing backside...

Copper surface passivation during semiconductor manufacturing

Method for forming a conductive copper structure

Fast deposition on spherical-shaped integrated circuits in non-cont...

High temperature plasma-assisted diffusion

Plasma-assisted metallic film deposition

Film growth system and method for spherical-shaped semiconductor in...

Patents Applicationslast 30 patents

Vapor deposition of benzotriazole (BTA) for protecting copper inter...

Systems and methods for removing/containing wafer edge defects post...

Vapor deposition of benzotriazole (BTA) for protecting copper inter...

Versatile system for wafer edge remediation

Method and apparatus for removing polymer residue from semiconducto...

Vapor deposition of benzotriazole (BTA) for protecting copper inter...

Plating-rinse-plating process for fabricating copper interconnects

Modified clean chemistry and megasonic nozzle for removing backside...