Charles Franklin Drill

Person

Boulder Creek, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Customized polishing pad for selective process performance during c...
- Patent number 7,018,282
- Issue date Mar 28, 2006
- Koninklijke Philips Electronics N.V.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Customized polishing pad for selective process performance during c...
- Patent number 6,572,439
- Issue date Jun 3, 2003
- Koninklijke Philips Electronics N.V.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for a gaseous environment providing improved c...
- Patent number 6,410,440
- Issue date Jun 25, 2002
- VLSI Technology, Inc.
- Charles F. Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry dispensing carrier ring
- Patent number 6,347,979
- Issue date Feb 19, 2002
- VSLI Technology, Inc.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor wafer, a chemical-mechanical alignment mark, and an a...
- Patent number 6,274,940
- Issue date Aug 14, 2001
- VLSI Technology, Inc.
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for dislodging by-product agglomerations from a polishing pa...
- Patent number 6,241,587
- Issue date Jun 5, 2001
- VLSI Technology, Inc.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Method and system for vacuum removal of chemical mechanical polishi...
- Patent number 6,190,236
- Issue date Feb 20, 2001
- VLSI Technology, Inc.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioning ring for use in a chemical mechanical polishing machine
- Patent number 6,139,428
- Issue date Oct 31, 2000
- VSLI Technology, Inc.
- Charles Franklin Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Complementary material conditioning system for a chemical mechanica...
- Patent number 6,022,265
- Issue date Feb 8, 2000
- VLSI Technology, Inc.
- Charles F. Drill
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for improving alignment for metal masking in c...
- Patent number 5,952,241
- Issue date Sep 14, 1999
- VLSI Technology, Inc.
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing system and method for optimization an...
- Patent number 5,653,622
- Issue date Aug 5, 1997
- VLSI Technology, Inc.
- Charles Drill
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for improving alignment for metal masking
- Publication number 20010012674
- Publication date Aug 9, 2001
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS

Charles Franklin Drill

Person

Patents Grantslast 30 patents

Customized polishing pad for selective process performance during c...

Customized polishing pad for selective process performance during c...

Method and apparatus for a gaseous environment providing improved c...

Slurry dispensing carrier ring

Semiconductor wafer, a chemical-mechanical alignment mark, and an a...

System for dislodging by-product agglomerations from a polishing pa...

Method and system for vacuum removal of chemical mechanical polishi...

Conditioning ring for use in a chemical mechanical polishing machine

Complementary material conditioning system for a chemical mechanica...

Method and apparatus for improving alignment for metal masking in c...

Chemical mechanical polishing system and method for optimization an...

Patents Applicationslast 30 patents

Apparatus for improving alignment for metal masking