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David Edwards Jr.
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Hamilton, MA, US
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last 30 patents
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Patent Grant
Ion beam blanking apparatus and method
Patent number
5,155,368
Issue date
Oct 13, 1992
Micrion Corporation
David Edwards
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized vacuum apparatus and method
Patent number
5,103,102
Issue date
Apr 7, 1992
Micrion Corporation
Nicholas P. Economou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Particle beam shielding
Patent number
4,976,843
Issue date
Dec 11, 1990
Micrion Corporation
Billy W. Ward
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Adhesion cooling for an ion implantation system
Patent number
4,724,325
Issue date
Feb 9, 1988
Eaton Corporation
Allen E. Armstrong
H01 - BASIC ELECTRIC ELEMENTS