Ebrahim Ghanbari

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West Nyack, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled plasma reactor
- Patent number 5,982,100
- Issue date Nov 9, 1999
- Pars, Inc.
- Ebrahim Ghanbari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputter etching apparatus with plasma source having a dielectric po...
- Patent number 5,556,521
- Issue date Sep 17, 1996
- Sony Corporation
- Ebrahim Ghanbari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool soft etch module and ECR plasma generator therefor
- Patent number 5,280,219
- Issue date Jan 18, 1994
- Materials Research Corporation
- Ebrahim Ghanbari
- H01 - BASIC ELECTRIC ELEMENTS