Felix Brinckmann

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Darmstadt, DE

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Patents Grantslast 30 patents

Information Patent Grant
Sputter apparatus with a pipe cathode and method for operating this...
- Patent number 7,842,167
- Issue date Nov 30, 2010
- Applied Materials GmbH & Co. KG
- Jurgen Henrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Sputter apparatus with a pipe cathode and method for operating this...
- Publication number 20070144891
- Publication date Jun 28, 2007
- Jurgen Henrich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...