Fumika Yoshida

Person

Hiratsuka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polarization purity control device and gas laser apparatus provided...
- Patent number 8,902,948
- Issue date Dec 2, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polarization purity control device and gas laser apparatus provided...
- Patent number 8,891,574
- Issue date Nov 18, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge chamber
- Patent number 8,855,167
- Issue date Oct 7, 2014
- Gigaphoton Inc.
- Shinji Nagai
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet light source device
- Patent number 8,610,095
- Issue date Dec 17, 2013
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas discharge chamber
- Patent number 8,503,499
- Issue date Aug 6, 2013
- Gigaphoton Inc.
- Shinji Nagai
- G02 - OPTICS
Information Patent Grant
Polarization purity control device and gas laser apparatus provided...
- Patent number 8,165,181
- Issue date Apr 24, 2012
- Gigaphoton Inc.
- Shinji Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Casing for laser device, production method and cleaning method of t...
- Patent number 6,627,843
- Issue date Sep 30, 2003
- Arms Komatsu Ltd.
- Yasuo Itakura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...
- Publication number 20140050239
- Publication date Feb 20, 2014
- GIGAPHOTON INC.
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISCHARGE CHAMBER
- Publication number 20130322483
- Publication date Dec 5, 2013
- GIGAPHOTON INC.
- Shinji NAGAI
- G02 - OPTICS
Information Patent Application
POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...
- Publication number 20120177072
- Publication date Jul 12, 2012
- GIGAPHOTON INC.
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISCHARGE CHAMBER
- Publication number 20110158281
- Publication date Jun 30, 2011
- GIGAPHOTON INC.
- Shinji NAGAI
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- Publication number 20100200776
- Publication date Aug 12, 2010
- GIGAPHOTON INC.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...
- Publication number 20100128747
- Publication date May 27, 2010
- GIGAPHOTON INC.
- Shinji NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Casing for laser device, production method and cleaning method of t...
- Publication number 20020041617
- Publication date Apr 11, 2002
- Komatsu Ltd.
- Yasuo Itakura
- H01 - BASIC ELECTRIC ELEMENTS

Fumika Yoshida

Person

Patents Grantslast 30 patents

Polarization purity control device and gas laser apparatus provided...

Polarization purity control device and gas laser apparatus provided...

Gas discharge chamber

Extreme ultraviolet light source device

Gas discharge chamber

Polarization purity control device and gas laser apparatus provided...

Casing for laser device, production method and cleaning method of t...

Patents Applicationslast 30 patents

POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...

GAS DISCHARGE CHAMBER

POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...

GAS DISCHARGE CHAMBER

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED...

Casing for laser device, production method and cleaning method of t...