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Georg Fink
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Munchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Positioning device
Patent number
11,075,102
Issue date
Jul 27, 2021
Suss MicroTec Lithography GmbH
Sven Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for active wedge error compensation between two o...
Patent number
9,329,473
Issue date
May 3, 2016
Suss MicroTec Lithography GmbH
Sven Hansen
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING A HOLDING MEANS F...
Publication number
20200353650
Publication date
Nov 12, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Uwe VOGLER
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Application
POSITIONING DEVICE
Publication number
20180138070
Publication date
May 17, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Sven Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR ACTIVE WEDGE ERROR COMPENSATION BETWEEN TWO O...
Publication number
20120299208
Publication date
Nov 29, 2012
Sven Hansen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL