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Gertjan ZWARTJES
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's-Hertogenbosch, NL
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Patents Grants
last 30 patents
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Patent Grant
Process based metrology target design
Patent number
10,296,681
Issue date
May 21, 2019
ASML Netherlands B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Process based metrology target design
Patent number
10,007,744
Issue date
Jun 26, 2018
ASML Netherlands B.V.
Guangqing Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
Publication number
20180268093
Publication date
Sep 20, 2018
ASML NETHERLANDS B.V.
Guangqing CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
Publication number
20160140267
Publication date
May 19, 2016
ASML NETHERLANDS B.V.
Guangqing CHEN
G06 - COMPUTING CALCULATING COUNTING