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Gyanaranjan Pattanaik
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Albany, NY, US
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last 30 patents
Information
Patent Grant
Method for filling recessed features in semiconductor devices with...
Patent number
11,621,190
Issue date
Apr 4, 2023
Tokyo Electron Limited
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal contacts with ruthenium metal plugs for semiconductor de...
Patent number
11,171,060
Issue date
Nov 9, 2021
Tokyo Electron Limited
Hiroaki Niimi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for filling recessed features in semiconductor devices with...
Patent number
11,024,535
Issue date
Jun 1, 2021
Tokyo Electron Limited
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FILLING RECESSED FEATURES IN SEMICONDUCTOR DEVICES WITH...
Publication number
20220301930
Publication date
Sep 22, 2022
TOKYO ELECTRON LIMITED
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FILLING RECESSED FEATURES IN SEMICONDUCTOR DEVICES WITH...
Publication number
20210287936
Publication date
Sep 16, 2021
TOKYO ELECTRON LIMITED
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL METAL CONTACTS WITH RUTHENIUM METAL PLUGS FOR SEMICONDUCTOR DE...
Publication number
20200279782
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Hiroaki Niimi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FILLING RECESSED FEATURES IN SEMICONDUCTOR DEVICES WITH...
Publication number
20200118871
Publication date
Apr 16, 2020
TOKYO ELECTRON LIMITED
Kai-Hung Yu
H01 - BASIC ELECTRIC ELEMENTS