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Substrate processing system
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Patent number 8,641,829
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Issue date Feb 4, 2014
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Hitachi Kokusai Electric Inc.
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Tomoki Horita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing system
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Patent number 8,506,714
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Issue date Aug 13, 2013
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Hitachi Kokusai Electric Inc.
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Tomoki Horita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of producing semiconductor device
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Patent number 8,227,346
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Issue date Jul 24, 2012
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Hitachi Kokusai Electric Inc.
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Hironobu Miya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of producing semiconductor device
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Patent number 8,105,957
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Issue date Jan 31, 2012
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Hitachi Kokusai Electric Inc.
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Hironobu Miya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device producing method
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Patent number 8,058,184
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Issue date Nov 15, 2011
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Hitachi Kokusai Electric Inc.
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Hironobu Miya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Production method for semiconductor device
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Patent number 8,039,404
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Issue date Oct 18, 2011
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Hitachi Kokusai Electric Inc.
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Hironobu Miya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device producing method
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Patent number 7,767,594
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Issue date Aug 3, 2010
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Hitachi Kokusai Electric Inc.
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Hironobu Miya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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