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Hozumi Usui
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Saitama, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of and apparatus for washing photomask and washing solution...
Patent number
7,077,915
Issue date
Jul 18, 2006
Renesas Technology Corp.
Yoshikazu Nagamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for cleaning photomask
Patent number
6,277,205
Issue date
Aug 21, 2001
Mitsubishi Denki Kabushiki Kaisha
Yoshikazu Nagamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for cleaning photomask
Patent number
6,071,376
Issue date
Jun 6, 2000
Mitsubishi Denki Kabushiki Kaisha
Yoshikazu Nagamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method of and apparatus for washing photomask and washing solution...
Publication number
20040079386
Publication date
Apr 29, 2004
Mitsubishi Denki Kabushiki Kaisha
Yoshikazu Nagamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY