Hugo Martijn MAKKINK

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DEN HAAG, NL

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle lithography apparatus and method of generating vac...
- Patent number 8,690,005
- Issue date Apr 8, 2014
- Mapper Lithography IP B.V.
- Sander Baltussen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VAC...
- Publication number 20100270299
- Publication date Oct 28, 2010
- MAPPER LITHOGRAPHY IP BV
- Sander BALTUSSEN
- H01 - BASIC ELECTRIC ELEMENTS