Ilya Grodnensky

Person

Foster City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High resolution monitoring of CD variations
- Patent number 8,049,903
- Issue date Nov 1, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
High resolution monitoring of CD variations
- Patent number 7,933,026
- Issue date Apr 26, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
High resolution monitoring of CD variations
- Patent number 7,567,351
- Issue date Jul 28, 2009
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of critical dimensions of etched features
- Patent number 6,956,659
- Issue date Oct 18, 2005
- Nikon Precision Inc.
- Ilya Grodnensky
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for preforming measurement of a dimension of a test mark...
- Patent number 6,750,952
- Issue date Jun 15, 2004
- Nikon Precision, Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for position measurement of a pattern formed b...
- Patent number 6,664,121
- Issue date Dec 16, 2003
- Nikon Precision, Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dimension measurement of a pattern formed...
- Patent number 6,538,753
- Issue date Mar 25, 2003
- Nikon Precision, Inc.
- Ilya Grodnensky
- G01 - MEASURING TESTING
Information Patent Grant
Method for use of a critical dimensional test structure
- Patent number 6,449,031
- Issue date Sep 10, 2002
- Nikon Corporation
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of characterizing photolithographic tool performance and pho...
- Patent number 6,323,938
- Issue date Nov 27, 2001
- Nikon Precision, Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a critical dimension test structure and its use
- Patent number 6,094,256
- Issue date Jul 25, 2000
- Nikon Precision Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining performance characteristics in...
- Patent number 5,835,227
- Issue date Nov 10, 1998
- Nikon Precision Inc.
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HIGH RESOLUTION MONITORING OF CD VARIATIONS
- Publication number 20110205554
- Publication date Aug 25, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
HIGH RESOLUTION MONITORING OF CD VARIATIONS
- Publication number 20090259605
- Publication date Oct 15, 2009
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
High resolution monitoring of CD variations
- Publication number 20070201017
- Publication date Aug 30, 2007
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR POSITION MEASUREMENT OF A PATTERN FORMED B...
- Publication number 20030215965
- Publication date Nov 20, 2003
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for preforming measurement of a dimension of a test mark...
- Publication number 20020180948
- Publication date Dec 5, 2002
- Ilya Grodnensky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for dimension measurement of a pattern formed...
- Publication number 20020180990
- Publication date Dec 5, 2002
- Ilya Grodnensky
- G01 - MEASURING TESTING
Information Patent Application
Measurement of critical dimensions of etched features
- Publication number 20020177057
- Publication date Nov 28, 2002
- Nikon Precision Inc.
- Ilya Grodnensky
- G01 - MEASURING TESTING

Ilya Grodnensky

Person

Patents Grantslast 30 patents

High resolution monitoring of CD variations

High resolution monitoring of CD variations

High resolution monitoring of CD variations

Measurement of critical dimensions of etched features

Apparatus for preforming measurement of a dimension of a test mark...

Method and apparatus for position measurement of a pattern formed b...

Method and apparatus for dimension measurement of a pattern formed...

Method for use of a critical dimensional test structure

Method of characterizing photolithographic tool performance and pho...

Method for forming a critical dimension test structure and its use

Method and apparatus for determining performance characteristics in...

Patents Applicationslast 30 patents

HIGH RESOLUTION MONITORING OF CD VARIATIONS

HIGH RESOLUTION MONITORING OF CD VARIATIONS

High resolution monitoring of CD variations

METHOD AND APPARATUS FOR POSITION MEASUREMENT OF A PATTERN FORMED B...

Apparatus for preforming measurement of a dimension of a test mark...

Method and apparatus for dimension measurement of a pattern formed...

Measurement of critical dimensions of etched features