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Jaehyug LEE
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Hwaseong-si, KR
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last 30 patents
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Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD USING THE SAME
Publication number
20230191555
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
Chaelyoung Kim
B24 - GRINDING POLISHING
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Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING SYSTEM INCLUDING...
Publication number
20230131040
Publication date
Apr 27, 2023
Samsung Electronics Co., Ltd.
Jaehyug LEE
B24 - GRINDING POLISHING