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last 30 patents
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Patent Grant
Scanning mechanism of an ion implanter
Patent number
7,259,380
Issue date
Aug 21, 2007
Tsinghua University
Jinsong Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Scanning mechanism of an ion implanter
Publication number
20050285052
Publication date
Dec 29, 2005
TSINGHUA UNIVERSITY
Jinsong Wang
H01 - BASIC ELECTRIC ELEMENTS