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Jörg Schuhmacher
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Grez Doiceau, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Slurry composition and method for chemical mechanical polishing of...
Patent number
8,080,505
Issue date
Dec 20, 2011
IMEC
Didem Ernur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Slurry composition and method for chemical mechanical polishing of...
Patent number
7,589,052
Issue date
Sep 15, 2009
IMEC
Didem Ernur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SLURRY COMPOSITION AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF...
Publication number
20090250433
Publication date
Oct 8, 2009
Interuniversitair Microelektronica Centrum (IMEC)
Didem Ernur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Slurry composition and method for chemical mechanical polishing of...
Publication number
20060014657
Publication date
Jan 19, 2006
Didem Ernur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Surface preparation using plasma for ALD Films
Publication number
20040071878
Publication date
Apr 15, 2004
Interuniversitair Microelektronica Centrum (IMEC vzw)
Jorg Schuhmacher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...