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Jue-Young Lee
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Suwon-City, KR
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Patents Grants
last 30 patents
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Patent Grant
Carrier head of chemical mechanical polishing apparatus having barr...
Patent number
7,303,466
Issue date
Dec 4, 2007
Samsung Electronics Co., Ltd.
Jae-Phil Boo
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Carrier head of chemical mechanical polishing apparatus having barr...
Publication number
20050272346
Publication date
Dec 8, 2005
Jae-Phil Boo
B24 - GRINDING POLISHING