Katsuhiko Wakana

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generation apparatus and maintenance method
- Patent number 11,036,150
- Issue date Jun 15, 2021
- Gigaphoton Inc.
- Katsuhiko Wakana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet discharge apparatus and calculation method
- Patent number 11,007,778
- Issue date May 18, 2021
- Gigaphoton Inc.
- Katsuhiko Wakana
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus and EUV light generating system
- Patent number 10,925,143
- Issue date Feb 16, 2021
- Gigaphoton Inc.
- Katsuhiko Wakana
- G02 - OPTICS
Information Patent Grant
Mirror device
- Patent number 9,229,192
- Issue date Jan 5, 2016
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Grant
Mirror device
- Patent number 9,046,651
- Issue date Jun 2, 2015
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND MAINTENANCE METHOD
- Publication number 20200142311
- Publication date May 7, 2020
- Gigaphoton Inc.
- Katsuhiko WAKANA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND EUV LIGHT GENERATING SYSTEM
- Publication number 20200077500
- Publication date Mar 5, 2020
- Gigaphoton Inc.
- Katsuhiko WAKANA
- G02 - OPTICS
Information Patent Application
DROPLET DISCHARGE APPARATUS AND CALCULATION METHOD
- Publication number 20190358952
- Publication date Nov 28, 2019
- Gigaphoton Inc.
- Katsuhiko WAKANA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
MIRROR DEVICE
- Publication number 20150226935
- Publication date Aug 13, 2015
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20130050862
- Publication date Feb 28, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS