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Kazunori Tsutsuguchi
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and recording medium for changing at...
Patent number
11,521,880
Issue date
Dec 6, 2022
Kokusai Electric Corporation
Satoru Takahata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of plasma processing a substrate placed on a substrate table
Patent number
6,194,037
Issue date
Feb 27, 2001
Kokusai Electric Co., Ltd.
Masato Terasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
Publication number
20200035533
Publication date
Jan 30, 2020
Kokusai Electric Corporation
Satoru TAKAHATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and semiconductor manufacturing method
Publication number
20010035124
Publication date
Nov 1, 2001
Satohiro Okayama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...