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Kazuyoshi Ueno
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
ULSI wiring and method of manufacturing the same
Patent number
8,784,931
Issue date
Jul 22, 2014
Waseda University
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device with improved stress migration resistance and...
Patent number
7,821,135
Issue date
Oct 26, 2010
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a semiconductor device featuring copper wiring la...
Patent number
7,741,214
Issue date
Jun 22, 2010
NEC Electronics Corporation
Toshiyuki Takewaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
7,566,973
Issue date
Jul 28, 2009
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing apparatus and semiconductor devi...
Patent number
7,563,696
Issue date
Jul 21, 2009
NEC Electronics Corporation
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
7,485,566
Issue date
Feb 3, 2009
NEC Electronics Corporation
Naoyoshi Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device featuring copper wiring layers of different wi...
Patent number
7,479,700
Issue date
Jan 20, 2009
NEC Electronics Corporation
Toshiyuki Takewaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
7,332,813
Issue date
Feb 19, 2008
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing process therefor as well as...
Patent number
7,259,095
Issue date
Aug 21, 2007
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing apparatus and semiconductor devi...
Patent number
7,220,318
Issue date
May 22, 2007
NEC Electronics Corporation
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device with guard ring for preventing water from ente...
Patent number
7,138,700
Issue date
Nov 21, 2006
NEC Electronics Corporation
Ryuji Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including dual-damascene structure and method...
Patent number
6,765,294
Issue date
Jul 20, 2004
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of a semiconductor device
Patent number
6,680,247
Issue date
Jan 20, 2004
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing apparatus and semiconductor devi...
Patent number
6,670,270
Issue date
Dec 30, 2003
NEC Electronics Corporation
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Copper interconnection
Patent number
6,670,639
Issue date
Dec 30, 2003
NEC Corporation
Hidekazu Okabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
COPPER WIRING STRUCTURE COMPRISING A COPPER MATERIAL BURIED IN A HO...
Patent number
6,486,559
Issue date
Nov 26, 2002
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
COPPER WIRING STRUCTURE COMPRISING A COPPER MATERIAL BURIED IN A HO...
Patent number
6,482,741
Issue date
Nov 19, 2002
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device plating apparatus
Patent number
6,478,935
Issue date
Nov 12, 2002
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor device having trench interconne...
Patent number
6,472,318
Issue date
Oct 29, 2002
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating apparatus utilizing an auxiliary electrode
Patent number
6,391,168
Issue date
May 21, 2002
NEC Corporation
Kazuyoshi Ueno
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Process for manufacturing semiconductor device and exposure mask
Patent number
6,268,090
Issue date
Jul 31, 2001
NEC Corporation
Yoshihisa Matsubara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of electroplating copper interconnects
Patent number
6,245,676
Issue date
Jun 12, 2001
NEC Corporation
Kazuyoshi Ueno
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method for manufacturing a semiconductor device
Patent number
6,221,765
Issue date
Apr 24, 2001
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilevel wiring structure and method of fabricating a multilevel...
Patent number
6,143,658
Issue date
Nov 7, 2000
Lucent Technologies Inc.
Vincent Michael Donnelly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a semiconductor device with a capacitor struc...
Patent number
5,696,017
Issue date
Dec 9, 1997
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a silicon oxide film containing fluorin...
Patent number
5,521,424
Issue date
May 28, 1996
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterojunction field effect transistor with improve carrier density...
Patent number
5,227,644
Issue date
Jul 13, 1993
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Junction between metal and zincblende-type III-V compound semicondu...
Patent number
5,098,858
Issue date
Mar 24, 1992
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor crystal
Patent number
4,980,750
Issue date
Dec 25, 1990
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ULSI WIRING AND METHOD OF MANUFACTURING THE SAME
Publication number
20100006326
Publication date
Jan 14, 2010
NEC ELECTRONICS CORPORATION
Kazuyoshi Ueno
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVI...
Publication number
20090258481
Publication date
Oct 15, 2009
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE FEATURING COPPER WIRING LA...
Publication number
20090081870
Publication date
Mar 26, 2009
NEC Electronics Corporation
Toshiyuki Takewaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVI...
Publication number
20070161128
Publication date
Jul 12, 2007
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing semiconductor device
Publication number
20070082476
Publication date
Apr 12, 2007
NEC Electronics Corporation
Naoyoshi Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20070018332
Publication date
Jan 25, 2007
NEC ELECTRONICS CORPORATION
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method of manufacturing the same
Publication number
20060175708
Publication date
Aug 10, 2006
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device featuring copper wiring layers of different wi...
Publication number
20060157854
Publication date
Jul 20, 2006
NEC Electronics Corporation
Toshiyuki Takewaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and manufacturing process therefor as well as...
Publication number
20050140013
Publication date
Jun 30, 2005
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device manufacturing apparatus and semiconductor devi...
Publication number
20050087138
Publication date
Apr 28, 2005
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor device with guard ring for preventing water from ente...
Publication number
20040195582
Publication date
Oct 7, 2004
NEC ELECTRONICS CORPORATION
Ryuji Tomita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULSI wiring and method of manufacturing the same
Publication number
20040126548
Publication date
Jul 1, 2004
WASEDA UNIVERSITY
Kazuyoshi Ueno
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor device and manufacturing method thereof
Publication number
20040004289
Publication date
Jan 8, 2004
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and manufacturing process therefor as well as...
Publication number
20030201536
Publication date
Oct 30, 2003
NEC Electronics Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULSI wiring and method of manufacturing the same
Publication number
20030124255
Publication date
Jul 3, 2003
NEC Corporation
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULSI wiring and method of manufacturing the same
Publication number
20030124263
Publication date
Jul 3, 2003
NEC Corporation
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing a semiconductor device and a plating appar...
Publication number
20030010632
Publication date
Jan 16, 2003
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULSI wiring and method of manufacturing the same
Publication number
20030008075
Publication date
Jan 9, 2003
WASEDA UNIVERSITY, NEC CORPORATION
Kazuyoshi Ueno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor device and a method for forming a via hole in a semic...
Publication number
20020177307
Publication date
Nov 28, 2002
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of a semiconductor device
Publication number
20020072226
Publication date
Jun 13, 2002
NEC Corporation
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device having trench interconnection and method of fa...
Publication number
20020027292
Publication date
Mar 7, 2002
Kazuyoshi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for manufacturing semiconductor device and exposure mask
Publication number
20010026906
Publication date
Oct 4, 2001
NEC Corporation
Yoshihisa Matsubara
H01 - BASIC ELECTRIC ELEMENTS