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Kazuyoshi Yamazaki
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,527,404
Issue date
Dec 13, 2022
Tokyo Electron Limited
Tetsuya Saitou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
10,864,548
Issue date
Dec 15, 2020
Tokyo Electron Limited
Hiroaki Ashizawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method, film forming system and surface processing method
Patent number
10,392,698
Issue date
Aug 27, 2019
Tokyo Electron Limited
Miyako Kaneko
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method for modifying high-k dielectric thin film and semiconductor...
Patent number
7,867,920
Issue date
Jan 11, 2011
Tokyo Electron Limited
Kazuyoshi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method
Patent number
7,754,293
Issue date
Jul 13, 2010
Tokyo Electron Limited
Shintaro Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma igniting method and substrate processing method
Patent number
7,497,964
Issue date
Mar 3, 2009
Tokyo Electron Limited
Masanobu Igeta
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200294799
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Tetsuya SAITOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film-Forming Method and Film-Forming Apparatus
Publication number
20200056287
Publication date
Feb 20, 2020
TOKYO ELECTRON LIMITED
Tsuyoshi TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20180311700
Publication date
Nov 1, 2018
TOKYO ELECTRON LIMITED
Hiroaki Ashizawa
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20180112312
Publication date
Apr 26, 2018
TOKYO ELECTRON LIMITED
Masaya ODAGIRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, FILM FORMING SYSTEM AND SURFACE PROCESSING METHOD
Publication number
20180037989
Publication date
Feb 8, 2018
TOKYO ELECTRON LIMITED
Miyako Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
Publication number
20130017690
Publication date
Jan 17, 2013
TOKYO ELECTRON LIMITED
Koichi Takatsuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND DEVICE ISOLATION METHOD
Publication number
20120252188
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Ryota YONEZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MODIFYING HIGH-K DIELECTRIC THIN FILM AND SEMICONDUCTOR...
Publication number
20090302433
Publication date
Dec 10, 2009
TOKYO ELECTRON LIMITED
Kazuyoshi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Formation of Gate Insulation Film
Publication number
20080233764
Publication date
Sep 25, 2008
Tsuyoshi Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film forming method
Publication number
20060234515
Publication date
Oct 19, 2006
TOKYO ELECTRON LIMITED
Shintaro Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma igniting method and substrate processing method
Publication number
20060205188
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Masanobu Igeta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treating apparatus and method of substrate treatment
Publication number
20060174833
Publication date
Aug 10, 2006
TOKYO ELECTRON LIMITED
Kazuyoshi Yamazaki
H01 - BASIC ELECTRIC ELEMENTS