Kenji Ohashi

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Tsukuba-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chemically amplifying type positive resist composition
- Patent number 6,767,686
- Issue date Jul 27, 2004
- Sumitomo Chemical Company, Limited
- Yasunori Uetani
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Chemically amplifying type positive resist composition
- Publication number 20020146641
- Publication date Oct 10, 2002
- Yasunori Uetani
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC